AMD

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMD850 1 2 13 42 348 220 57.5 220 10 14-20-27 7 Series AMD AMD801/901/800/900/1000 Dimensions AMD801/901 ORIENTATION Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

AME

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) HA Maintenance space AT ID AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G AM I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 36 9 205 19 100 106 3 106 10 1 2 3 4 , AME450 Misc. 212 22 107 106 3 106 10 36 221

AMF

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) Maintenance space HA AT ID AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

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LATVIA SMC Pneumatics Latvia SIA LITHUANIA SMC Pneumatics Lietuva, UAB NETHERLANDS SMC Pneumatics BV NORWAY SMC Pneumatics Norway A/S POLAND SMC Industrial Automation Polska Sp.z.o.o. ROMANIA SMC Romania S.r.l. RUSSIA SMC Pneumatik LLC. SLOVAKIA SMC Priemyseln Automatizci, s.r.o. SLOVENIA SMC Industrijska Avtomatika d.o.o. SPAIN / PORTUGAL SMC Espaa, S.A.

Compressed Air Preparation Filter

Auto drain usually discharges the condensate with the manual knob set to S side. Manual auto drain discharge is also possible. Damage, failure, or malfunction may occur if this product is operated above the maximum operating pressure.

Series 10-MGF Guide table ø40, ø63, ø100

When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch. 95 Guide table10-MGF Dimensions 10-MGF40/63/100 4-N V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2-P(Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4-M K KB KC 6-K (6 positions) 9 9

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 M N 120 O 184 P 220 Q 110 R 18 460.5 AM850 1 2 13 42 348 220 57.5 220 10 AM850SAM, #7 4.6-5 Series AM Made to Order Specifications Please contact SMC for detailed specifications, dimensions or delivery.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

6 11/2 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMD850 13 42 348 220 57.5 220 10 AMD850SAM, #7 4.6-12 Series AMD Precautions Dimensions: AMD801/901/800/900/1000 AMD801/901 Be sure to read before handling.

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

6.0 , 2 1 1/2 J 30 K 15 L 24 M 13 N 120 O 184 P 220 Q 110 R 18 4.6-20 Series AMH Made to Order Specifications Please contact SMC for detailed specifications, dimensions or delivery.

Ozone Resistant

. : Time it takes for ozone to generate cracks (h) C: Ozone concentration (ppm) n: Constant that varies depending on the rubber material Take the logarithm and rearrange the above equation as follows: log = K n logC K: Constant YU.S Zuev and S.I.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Soft Start-up Valve AV2000/3000/4000/5000

F C Soft start-up valve Manual override Nil: Non-locking push type (flush type) B: Locking type (tool required) C: Locking type (lever type) Body size 1/4 3/8 1/2 3/4, 1 20 30 40 50 Thread type Indicator light/Surge voltage suppressor Rc G NPT Nil F N None With surge voltage suppressor (grommet type only) With indicator light/surge voltage suppressor (not possible with grommet type) Nil S

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

VVXA21/22

Fluid Seal material NBR, FKM, EPDM Manifold body, Base (2) Aluminum Air Liquid Non-leak, Vacuum q 106 Pam3/s or less (1) 1 cm3/min or less 0.1 cm3/min or less Valve assembly NBR, Polyacetal Aluminum FKM/EPDM w Note 1) Differs depending on the operating conditions such as pressure, etc. Note 2) Value on option V (Non-leak, Vacuum).

Adsorption Plate

Adsorption force (Theoretical fixing force) W = P x S x K (0.15) x 0.1 W : Adsorption force (N) S : Adsorption surface area (cm2) P : Vacuum pressure (kPa) K : Aperture ratio 0.15 (15%) Do not apply a pressure or load of 0.1 MPa or more to the adsorption surface. Doing so may cause a reduction in flatness, damage, or impact marks.