CV/MVGQ

58.5 56 69.5 59 56 112 63 57.5 62 57.5 104 121 112 Operating Range C J G5-S CV Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

Compact Guide Cylinder

161 201 241 281 IN 302 60 90 121 151 181 211 25 (20 x 2) 10 OUT 628 126 188 251 314 377 440 IN 471 94 141 188 236 283 330 32 (25 x 2) 12 OUT 982 196 295 393 491 589 687 IN 756 151 227 302 378 453 529 40 (32 x 2) 16 OUT 1608 322 483 643 804 965 1126 IN 1206 241 362 483 603 724 844 50 (40 x 2) 18 OUT 2513 503 754 1005 1257 1508 1759 IN 2004 401 601 802 1002 1203 1403 63 (45 x 2) 20 OUT 3181

Basic Type/Direct Mount Type

44 55 67 85 97 CB 2 2 2 3 3 3 5 5 5 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121

Pin Clamp Cylinders

181 241 302 362 422 13.5 to 20.0 121 181 241 302 362 422 483 543 603 Note 1) It takes approximately 0.3 seconds for the cylinder to operate to generate clamping force from an unclamping state (when no speed controller is installed).

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

112 121 19 Series CLA2 Minimum Stroke for Auto Switch Mounting n: Number of auto switches [mm] Auto switch model Number of auto switches Brackets other than center trunnion Center trunnion 40 50 63 80 100 2 (Different surfaces, same surface), 1 15 80 95 110 115 D-M9l D-M9lW D-M9lA n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121

CNA

31 4 2 8.5 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5 50 50 9.5 86.5 2 10.5 0 78 35 4 2 8.5 77 0 0.5 11.5 1.5 43.5 78.5 77 42.5 0 0 86 3.5 42 49 63 63 13 93.5 4.5 13 2 85 42 6.5 5.5 12 91 1.5 3 14 5 50.5 85.5 91 48 2.5 3.5 93 6 50 55.5 80 80 15.5 102 8 16.5 4.5 93.5 50 10 8 14.5 107 4 6.5 17.5 7.5 59 94 107 54 6 6 101.5 9.5 57.5 63 100 100 18 112 9.5 18 7 104 57.5 11.5 10.5 17 121

CP95

D EE PL RT I12 KK SW G BG (MIN) L8 E R VD VA WA WB WH ZZ ZY I2 I9 M10 x 1.25 32 22 30 12 G 1/8 13 M6 x 1 6 10 27 16 94 4 4 4 6.5 26 146 190 46 32.5 15 4 M12 x 1.25 40 24 35 16 G 1/4 14 M6 x 1 6.5 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 M16 x 1.5 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 M16 x 1.5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 16 31.5 16 121

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

XM, XY

92.1 10.5 9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121

100

With pressure gauge With vacuum pressure detection port Branch Dimensions ZL6mmm-m (Without supply valve or release valve) ZL6 Without valve Branch Vacuum (2/V) port1 2(V) 2(V) 2 x Rc1/2, G1/25, NPT1/2 (Recommended tightening torque: 28 to 30 Nm) 2(V) 1(P) With vacuum With pressure Branch Silencer exhaust EXH With vacuum pressure switch pressure detection port gauge EXH. port exhaust G 121

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.

Table of Contents

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Weight (g) Vane type Single vane Double vane CRB2BW15-S CRB2BW20-S CRB2BW30-S CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D 90 Model CRB2BW40-D CRB2BW10-S 90 180 180 100 270 180 90 270 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Rotating angle Body of rotary actuator 26.3 26.0 376 400 446 25.7 49 387 365 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange

C95

) B e11 E R BG (MIN) AM D EE PL RT L12 KK SW G L8 VD VA WA WB WH ZZ ZY L2 L9 22 24 32 32 40 40 30 35 40 45 45 55 12 16 20 20 25 30 G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121

CP95

20ZY + Stroke Data Bore size (mm) AM KK L8 SW B D G EE BG (MIN) PL RT I12 E R VD VA I9 WA WB WH ZZ ZY I2 M10 x 1.25 32 6 16 94 22 30 10 27 12 G 1/8 13 M6 x 1 4 15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121

MU

side flange style RQ MU D-X 20Data Spring return ZZ + Stroke Spring extend ZZ + 2 x Stroke (mm) ZZ 104 111 124 149 155 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Single clevis style Double clevis style Single clevis style Double clevis style (mm) ZZ 121

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

25 36 x 32 32 45 x 40 40 55 x 50 50 68 x 63 63 87 x 80 80 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 145 218 290 363 436 508 581 653 726 MGZ20 10 Foot MGZ-L05 MGZ-L06 MGZ-L08 47 71 94 118 141 165 189 212 236 Flange MGZ-F05 MGZ-F06 MGZ-F08 217 326 434 543 651 760 868 977 1085 MGZ25 12 76 113 151 189 227 265 302 340 378 324 486 648 811 973 1135 1297 1459 1621 MGZ32 16 Switch spacer 121