MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

CG5-S

H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX + 0.2 + 0.1

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

Modular F.R.L. Unit

Note 6) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch.

3 Port Air Operated Valve Series SYJA300 1

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Prevents Micro-Bubbles

Removal of drainage Flush drainage from filters regularly. 17-5-42

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 Type K3 ZR1-VK3M Pilot air Circuit diagram Pilot air PS PE Air operated b Air operated a PV PD Release valve Supply valve V Pilot valve for release valve Pilot valve for vacuum switching valve Manual override Dimensions not indicated are identical to type K2. 13-3-42 42 Series ZR Large Size Vacuum Module: Vacuum

VCL

19.3 38.5 66 VV2CS4 26 68 47.5 58.5 70 103 94 57 25.5 28.5 30 5.5 42 20.8 41.5 74 344

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

-01 Type SS3YJ7-42-C6 1/4 Type SS3YJ7-42-C8 Body ported for external pilot SYJ72R 1/4 1/8 2.2 0.34 0.55 2.4 0.32 0.62 Type SS3YJ7-21R Type SS3YJ7-41R 2.2 2.0 1.6 2.1 0.35 0.27 0.32 0.24 0.59 0.47 0.39 0.51 2.4 2.2 2.2 2.3 0.36 0.32 0.27 0.31 0.66 0.56 0.54 0.59 1/8 1/8 C6 1/4 1/4 1/4 C8 1/4 Base mounted for external pilot Type SS3YJ7-42R-01 SYJ74R Type SS3YJ7-42R-C6 Type SS3YJ7-42R-C8 Note

Thermo-chiller/Rack Mount Type

The weight will increase by 2 kg when Option T1 (Inverter pump mounted) is selected. 12 Option M (Applicable to DI water piping) does not contain copper. 13 For Option DM (With electric conductivity control function, Applicable to DI water piping) 14 If the product is used at an altitude of 1000 m or higher, refer to For altitudes of 1000 m or higher on page 42. 15 No continuous voltage

CJ5-S

NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9

CJ5-S

NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16

Digital Flow Switch (Integrated display type) ( compatible)

Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (Page 42) 6. Completed [F 1] Setting of OUT1 is completed. -37No.PF-OMV0006-B Press the UP or SET button in function selection mode to display [F 1]. Press the SET button. Move on to output mode setting.

HRX-OM-X037

Table 9.7-1 Standards Standard CE Mark EMC Directive Machinery Directive 2014/30/EU 2006/42/EC NRTL *1 E112803(UL61010-1) *1: Except option-T2 and T3,water-cooled type.

Electric Actuator Miniature Rod Type Miniature Slide table Type

/See 7.3 Caution(2) on p.42 and Caution(12) on p.43 i < Moving force> The upper force limit for the pushing operation starting position The force is automatically adjusted corresponding to the load. Initial value: Set to [150%] /See 7.2 Caution(4) on p.42 j < Area1Area2> This is the condition that turns on the AREA output signal. The setting condition should be Area 1

2–4

HS A B Reed switch Solid state switch D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F7BAL D-F7 F D-F7NTL 32, 40, 50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-F7LF D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs A B Hs 32 40 50 32.5 36 42 10.5 13 16 13.5 17.5 15.5 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore

Modular F.R.L. Unit

ES100-42) for detailed information and specifications on the digital pressure switch.

Title not found

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

Air Cylinder CLA Series Fine Lock Model

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

MXS Series Air Slide Table

Q Q MXS Series Q Q Q Product Features .pages 42-43 Q Q MXS Series Q How to Order .page 44 Specifications.pages 45-46 Q How to Select .pages 47-48 Q Table Deflection .pages 49-50 Q Stroke Adjuster .pages 51-52 Construction/ Parts List, Seal Kits .page 53 Q Dimensional Drawings.pages 54-65 Q How to Order MXS L (Symmetric type) .page 66 Dimensional Drawings MXS L (Symmetric