Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 6 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 14 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 3 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 4 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 10 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 41 (Common SUP, Common EXH, Side Ported), Stations: 8 Stations, Port Size: M5 (M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 2 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 5 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 6 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 14 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 3 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 4 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 10 Stations, Port Size: M5X0.8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 8 Stations, Port Size: M5X0.8, Thread: -

Mini Rotary Actuator

Effective torque table (Nm) Operating pressure(MPa) Size 0.15 0.2 0.3 0.4 0.5 0.6 0.7 05 0.013 0.017 0.026 0.034 0.042 0.050 0.059 1 0.029 0.038 0.057 0.076 0.095 0.11 0.13 18 - Internal structure and parts description CRJB05~1 7 4 3 12 8 1 9 11 10 2 11 9 8 12 12 Hexagon socket head set screw 2 11 Wear ring 2 10 Magnet 2 9 Piston seal 2 8 O-ring 2 7 Round head no. 0 Philips screw 3 6

IDX-OM-O004E

Specification for Option M 11 . 1 Safety instructions . 11 1 11 . 2 Specifications . 11 1 11 . 3 Installation of motor type auto drain . 11 2 11 . 4 Electric wiring diagram . 11 2 Chapter 12 Specification for Option R 12 . 1 Safety instructions . 12 1 12 . 2 Specifications . 12 1 12 . 3 Power supply connection procedure . 12 1 12 . 4 Cautions for handling the GFCI . 12 2 12 . 5 Electric

IDX-OM-O004C

M 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-2 12 R 12.1 . 12-1 12.2 . 12-1 12.3 . 12-1 12.4 . 12-2 12.5 . 12-3 13 S 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 T 14.1 . 14-1 14.2 . 14-1 14.3 . 14-1 14.4 . 14-2 14.5 . 14-3 i i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1 i.2.2 i.2.3 50 i.2.4 i 3 i i.2.5 0 i.2.6 WARNING !

High Vacuum L Type Valve

XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

High Vacuum L Type Valve

11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Nil W 2-5-5 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 0 1 G H 2 position single: VQ415 155.5 105.5 155.5 105.5 42.5 50 42.5 50 Indicator light 23.5 23.5 11 (12.5) 11 (12.5) 2(B) port 4(A) port VQC 5 3 4 2 SQ 9 38 48 A B 38 24.6 10.5 48 11 1 A 4 2 VQ0 3 5 1 14 12 13.5 13.5 30 45 2-5.6 Mounting hole 30 45 VQ4 2-5.6 Mounting hole Manual override 5-Rc 1/