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(Page 77) 8200 0x2008 0 R Temperature PD conversion equation: a F32 N 8210 0x2012 0 R Temperature PD conversion equation: b F32 N 8220 0x201C 0 R Flow peak value S16 N 0xFF9C to 0x0258 (-100 to 600) 8230 0x2026 0 R Flow bottom value S16 N 8400 0x20D0 0 R Pressure PD conversion equation: a F32 N Refer to "Inclination and intercept to the unit specification".

Minimum Stroke for Auto Switch Mounting n: Number of auto switches [mm] Auto switch model Number of auto switches 32, 40, 45, 50, 56, 63, 67, 80, 85, 100 2 (Different surfaces, Same surface), 1 15 D-M9m D-M9mW n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1 10 D-M9mV D-M9mWV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1

R 1 (male) R 11/2 (male) NPT 1 (male) NPT 11/2 (male) NPT 2 (male) Thread symbol and size AMG Symbol Nil R 2 (male) Symbol N 3/8 inch Drain tube O.D.

Single clevis MUC25SMU25, #5 (#1+#5+#11) MUC32SMU32, #5 (#1+#5+#11) MUC40SMU40, #5 (#1+#5+#11) MUC50SMU50, #5 (#1+#5+#11) MUC63SMU63, #5 (#1+#5+#11) 2.4-5 Plate Cylinder/Double Acting Double Rod Series MUW 20, 32, 40, 50, 63 How to Order Standard MUW B 25 30 D M MDUW B 25 30 D M A73 S With auto switch Built-in magnet Number of auto switches 2 1 n Double rod S n Mounting B L F Basic Foot

EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE N L 1 2 TB 3 TB 3 TDR MC TDR MC TDR ILS TDR ILS

FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2 1 PE 3 1 2 PE N L Operation Failure 3 1 2 PE N L 3 1 2 PE N L TB L N PE 2 3 1 TB TB ILS TB TDR MC TDR MC ILS TDR MC ILS ILS ILS MC MC MC MC OLR

Specialty Regulators NAR Series Pressure Regulator NAR425, 435, 625, 635, 825, 835, 925, 935 s n o i t a c i f i c e p S l e d o M 5 2 4 R A N 5 3 4 R A N 5 2 6 R A N 5 3 6 R A N 5 2 8 R A N 5 3 8 R A N 5 2 9 R A N 5 3 9 R A N e z i S t r o P 2 / 1 8 / 3 4 / 1 1 4 / 3 2 / 1 1 4 / 1 1 2 ) a P M ( g i s p e r u s s e r p f o o r P ) 5 . 1 ( 0 2 2 e r u s s e r p g n i t a r e p o . x a

Moreover, leakage current flow to the load will be "n" times larger when n auto switches are connected in parallel. 7. Do not use a load that generates surge voltage. If driving a load such as a relay that generates a surge voltage, use a contact protection box.

Note 3) When two or more symbols are specified, indicate them alphabetically. 2-3-7 8 Series SQ1000 Manifold Option Blanking plate SSQ1000-10A-3 Individual SUP/EXH spacer SSQ1000-PR1-3Name plate (-N) SSQ1000-N3-n External pilot specifications (-R) P. 2-3-44 P. 2-3-45 P. 2-3-47 P. 2-3-48 C6 L6 External pilot port SUP/EXH block SSQ1000-PR-3-C8 (-S) SUP block plate SSQ1000-B-P Blanking plug

PE 3 2 1 PE L N TB ILS ILS TDR MC MC TDR TDR MC MC TDR PTC MC OLR OLR MC PTC CM MC MC CM MC TDR TDR MC C11 PRS FM1 FM1 PRS P P C12 FM2 FM2 MOV MOV For Option M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI GFCI For option R For Option R Operation Failure TB L N PE 1 2 3 Operation Failure TB L N PE 2 3 1 TDR MC ILS TDR MC ILS TDR MC OLR EDV PTC MC 01 For Option M CM MC TDR MC OLR PTC FM1 PRS

(page 75) 8010 0x1F4A 0 R Flow rate PD intercept b F32 N The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Flow bottom value S16 0 N 8020 0x1F54 0 R Flow peak value S16 0 N -200 to 4200 0 R Accumulated mantissa F32 N 0 to 9 Accumulated PD Accumulated value conversion factor = Current accumulated

Selection Series MQQ Caution Operating Speed Allowable Kinetic Energy Anti-lateral Load Type: MQQ Load Weight and Maximum Speed: MQQT/MQQL Bore size (mm) Allowable kinetic energy (J) 10 16 20 25 28 1000 Example) Driving a load of 15 (N) using MQQ20 with a muximum speed of 167 (mm/s) 0.006 500 0.010 0.022 0.044 100 0.080 50 Load weight W (N) Cover range of MQQL (15) 10 MQQ28 5 MQQ25 MQQ20

OUT(2) 1 Thread type Rc NPT G Nil N F IN(1) Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Port size Class 3 Port size 1/8 (6A) 1/4 (8A) Class 2 Class 4 Symbol 01 02 03 04 06 3/8 (10A) 1/2 (15A) Class B in AC has a rectifying circuit built-in. Class H is AC only. No rectifying circuit.

Thread type Rc NPT G Nil N F OUT(2) 1 IN(1) Port size Voltage Port size 1/8 (6A) Class 3 Class 2 Class 4 Symbol 01 02 03 04 06 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Please consult with SMC regarding other voltages.

Pressure Measurement related SUP port pressure peak value S16 0 N 8220 0X201C 0 R SUP port pressure bottom value S16 0 N 8230 0X2026 0 R Inclination a F32 Refer to "Distance Conversion N Refer to "Distance measurement value set range".

25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

(page 79) 8010 0x1F4A 0 R Flow rate PD intercept b F32 N The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Flow bottom value S16 0 N 8020 0x1F54 0 R Flow peak value S16 0 N -200 to 4200 1 R Accumulated mantissa F32 N 0 to 9 Accumulated PD Accumulated value conversion factor = Current accumulated