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For AIR EXH: AN120-M5 Foot Silencer Specifications Symbol Model PB1011A PB1013A Built-in solenoid valve Actuation Air operated Main fluid suction/discharge port Rc, NPT, G 1/8 female thread Rc, NPT, G 1/8 female thread Supply port Exhaust port Port size Pilot air M5 x 0.8 female thread AIR SUP AIR EXH FLUID OUT Body wetted parts Diaphragm Check valve Liquid contact seals Polypropylene (PP

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm2 D1 Model L1 TPH TPS A (M5) Connection thread R M H (width across flats) Applicable tubing O.D. mm Note 1) Weight g L1 L2 M D2 M M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Precautions 1

Rod End Nut (mm) Trunnion Nut (mm) Mounting Nut (mm) H Material: Carbon steel Material: Carbon steel Material: Carbon steel d d B D D C C C D H B H B d Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 B C D d H D d H C B d H B C D Part no. NT-02 NT-03 NT-04 Part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K

ARJ1020F

made of aluminum (60 g) Standard Specifications ARJ210-M5 Model 1/8 (Male thread), M5 x 0.8 (Female thread) IN side Two styles of piping connections provided for the IN side: 1/8 (male thread) and M5 (female thread) Port size M5 x 0.8 (Female thread 2 pcs.)

ZSE40/ISE40

threads 5-wire oil resistant heavy-duty cord (0.15 mm2) 01/T1 types approx. 60 g, W1 type approx. 80 g, C4/C6/M5 types approx. 92 g (Each including 0.6 m lead wires) Port size Lead wire Weight Note) When equipped with auto shift function, the following ranges can be set.

Serial Transmission System Series EX250 Series EX500

Stations 1 station MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) 1 24VDC/60mA/IP65 8-point integrated type, M8 connector, PNP specifications C US TYPE1 R EX500-IE1 (PNP) 24VDC/60mA/IP65 TYPE1 EEX500-IB1-M6 1 set EX500-IE1 4 sets EX500-IE3 2 sets 24VDC/60mA/IP65 MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) MADE IN JAPAN C US TYPE1 8-point integrated type, M8 connector, NPN specifications R MADE

Pressure Sensor

cable 3 cores 2.7x3.2 3 m Sensor cable Sectional area of conductor: 0.15 mm2 Outside diameter of insulator: 0.9 mm With sensor cable 42.4 g 42.7 g 49.3 g 41.4 g 41.6 g 43.3 g 44.1 g Mass Without sensor cable 2.9 g 3.2 g 9.8 g 1.9 g 2.1 g 3.8 g 4.6 g -12No.PS-OMG0004-D Analog output Range Rated pressure range A B C For vacuum 0.0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -100 to 100 kPa

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

NDh8 WB WA Section Y detail Y GB GC GA Relief port M5 x 0.8 Mounting nut MM NN WW Rod end nut Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 C D B 0 0.3 B 0 0.3 Head cover port location Axial (R) Z + Stroke S + Stroke NB H NA F A The overall cylinder length does not change.

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q B S W U K L E R I AA AL AP X A AB J V Y + Stroke Z + Stroke 8 x AF AC AD AE (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G H I J K L M N 90 11 11 7.5 75 30 6 25 108 15 60 92 5.5 30 55 60 80 25 45 M5 x 0.8 depth 10 M8 x 1.25 depth 14 75, 100, 125, 150, 200 9.5 depth 6 100 14 13 7.5 85 30 6 30 130 17.5 65 113 6.6 35 65 70 100

1.63

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

CU

K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

10112122Rubber bumper GB GC GA NN MM Mounting nut Relief port M5 x 0.8 Rod end nut NN Cover surface Piping port 2 x M5 x 0.8 C D B 0 0.3 FY FB B 0 0.3 FZ FX 2 x FC Mounting hole Z + Stroke S + Stroke NB H NA F A FT F (mm) FZ 42 42 FY 20 20 FX 33 33 FT 2.3 2.3 FC 5.5 5.5 17.5 19 FB 11 11 GC 17 20 C 15 18.3 B 90 91 Z 54 55 S 9.5 9.5 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 NN M4 x 0.7 M5 x 0.8

Thermo-chiller

D-G

SYJA300

N.O. 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure MPa Flow Characteristics/Mass Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 12 (PA) 23 (AR) Valve model Mass (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 34 N.O.

Low Profile Slide Table Series MXF

GR-S-005 (5 g) GR-S-010 (10 g) GR-S-020 (20 g) GR-S-050 (50 g) GR-L-005 (5 g) GR-L-010 (10 g) GR-L-020 (20 g) GR-L-050 (50 g) Applied part Guide Cylinder Dimensions: Stroke Adjusting Bolt Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25

Digital Flow Switch (Integrated display type)

860 g 1075 g With flow adjustment valve 310 g 360 g 610 g Weight With temperature sensor and flow adjustment valve 385 g 435 g 730 g With lead wire +85 g 1: Please refer to the chart of measurement range of ethylene glycol aqueous solution on page 75.

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.