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0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 5 Series IR1000/2000/3000 Series IR2000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

Allowable horizontal direction load l l m m0 l = 50mm Graph 1 l = 100mm Graph 2 v = 100mm/s or less Graph 6 v = 50mm/s or less Graph 5 300 300 MGF100 MGF100 50 200 200 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 20 20 MGF40 MGF40 10 10 10 MGF40 MGF40 10 5 4 3 5 4 3 2 2 5

IDX-OM-W023-B / Series IDU8E-10(-C,K,L,M,R,S,T) IDU8E-20(-C,K,L,M,R,T) IDU11E-10(-C,K,L,M,R,S,T) IDU11E-20(-C,K,L,M,R,T) IDU15E1-10(-C,K,L,M,R,S,T) IDU15E1-20(-C,K,L,M,R,T) IDU8E-23(-C,K,L,R,T,V) IDU11E-23(-C,K,L,R,T,V) IDU15E1-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 )

to 10.5 l/min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min Set flow rate range Note 1) 0.1 l/min 0.5 l/min 1 l/min 2 l/min 5 l/min Minimum set unit Note 1) Accumulated pulse flow rate exchange 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse value (Pulse width: 50 ms) Note 1) Note 2, 3) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Display units l, ft3

How to order: EX500-AP 050 S How to order: EX500-AC 030 SSPS How to order: EX500-AC000-S 1 How to order: EX9-AC 010 1 How to order: EX9-AP 010 7 Cable length (L) Connector specification 003 0.3 [m] 005 0.5 [m] 010 1 [m] 030 3 [m] 050 5 [m] Cable length (L) Connector specification 010 1 [m] 050 5 [m] Cable length (L) 010 1 [m] 030 3 [m] 050 5 [m] Cable length(L) 010 030 1[m] 3[m] S Straight

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

SImA, rma l vollaQl9"IV ()( less ZSE4B-~: -26 Vacuum Analog output 1-5V( S%F S.I. load lq>edaoc:e: IkO ZSE4B -~: -65 P NP output PNP open co~ eclor MmA ISE4LB~i -25 Posilive pressure NPN output NPN0)J (l OJi eclGf 30V. 8rhA, resma l vol tage'!

12.R 12.5 IDF15E1-10-R IDF15E1-20-R N L N L GFCI GFCI PE TB ILS ILS OLR PTC OLR PTC CM CM C02 C01 C11 C11 FM FM PRS PRS P P CM PTC PTC C01 FM PRS C02 OLR PC C11 ILS TB GFCI 12 3 13.S S 13 13.1 13.2 IDF15E1-20 L N PE M3 6.5mm 1.25mm 2 13 1 13.S 13.3 IDF15E-10-S PE N L TB CM ILS FM PTC OLR OLR ILS PTC PTC CM PRS C01 C02 TB C01 C02 C11 FM C11 PRS P 13 2 14.T

(rad/s) : Rotation angle.(rad) 180 = 3.14rad t: Rotation time.

(EX245-EA2-1) No. 1 SI ON/OFF 2 3 4 SI 5 . 11 11 No.EX-OMU0020CN 2. . 2-1 EX245 DC24 V 1 msec IP65 CE RoHS AC500 V1 FE DC500 V10 M FE -1050 -2060 35%85%RH 1057 Hz0.75 mm p-p 57150 Hz49 m/s 2 XYZ 2 2 XYZ 3 () 147 m/s 12 No.EX-OMU0020CN 3. 3.1. 8 VQC4000 7 2 x M5 ( = 1.5 Nm) 2 x M5 (SI = 1.5 Nm) 4 x M* . 3-1 13 No.EX-OMU0020CN 3.1.1.

Output specifications 25 (L) 26 (L) 67 (L) 26 (L) 27 (L) 67 (L) 1 output NPN open collector 30V, 80mA or less ZSE4 ZSE4B Analog output (1 to 5V) 1 output PNP open collector 80mA or less Analog output (1 to 5V) ZSE4E 2 outputs NPN open collector 30V, 80mA or less 2 outputs PNP open collector 80mA or less Refer to CAT.E824-A "Pressure Switch" for details on switches. 6 Multistage Ejector

: 0.5MPa SRP1-M5 Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure

Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI unit: torque = 1.5 Nm) 4 x M(Valve manifold: refer to valve manifold catalogue) OFF US1 is not present or is below the dropout level (< approx. 17 VDC). Refer to the product catalog or operation manual to obtain more detailed information about outline dimensions.

TMH Option Type With One-touch fitting Nil S None With seal ASD 2 3 Elbow Universal Stainless steel specifications (SUS303) M5 and U10/32 are not available with seal. AS Thread type Applicable tubing O.D.

M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN