MG

3 Hexagon socket head taper plug Slide Bearing Felt Holder Ball bushing 16 20 25 32 40 50 63 80 100 MGP50-A-PS MGP63-A-PS MGP80-A-PS MGP100-A-PS MGP16-A-PS MGP20-A-PS MGP25-A-PS MGP32-A-PS MGP40-A-PS Set of nos. above @3, @4, @5 @6, @7, @8 Set of nos. above @3, @4, @5 @6, @7, @8 !4 !5 !6 !7 Except 16 Except 16 Seal kit includes @3 to @8.

42

10.7 129.5 Note 2) SI Unit 47 106 94.7 For U side mounting (S) For D side mounting (SD) 9 9 71.7 27 36.1 X 12 X 12 n B A 8 2 4 B A 7 2 4 Manual override B A 6 4 2 1/4" Note 3) B A A B 5 SMC SMC SMC SMC SMC B A 2 4 L2 L1 B A A B 4 B A Indicator light 2 4 A B A B 3 B A 2 4 B A A 2 A 44 P = 25 2 4 B A A D side 1 A 4 2 50.5 Stations 38 27 1/8" External pilot port 11.7 139.9 (Single) 16.2 148.9

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Series SV

A A A A A 98.2 5.5 A B A B 58.9 17.5 29.6 56.3 12.2 Manual override Press and turn for the locking type.

Slider Type Ball Screw Drive/11-LEFS Series

A 20 11LEFS 10 15 Lead A 10 11LEJS 5 Lead H Lead H 5 25A0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEC LEFS32/Ball Screw Drive LEC S Horizontal Vertical LEC SS-T 30 50 Lead B LEC Y 40 Work load: W [kg] Work load: W [kg] Lead B 20 Motorless Lead A 30 Lead A LAT 20 10 Lead H Lead H LZ 10 0 0 LC3F2 0 100 200 300 400 500 600 0 200 400 600 800 1000

LEC-OM07605CN

PA23] STO IEC/EN 61800-5-2STO ON/OFF (MR Configurator2) SSCNET/H (MR Configurator2) (MR Configurator2) 1 8 1. 1.6 (1) LECS S 2 T5 S SSCNET/H ACT5, T6 T5 50W,100W ACT7 200W T7 ACT8 400W T8 (2) a) ACT9 T9* 750W * AC200VAC240V 50/60Hz 2 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R 1 9 1. bSSCNET (LECSS-S/LECSS2-T) LE-CSS-MR-J3BUSM cI/O (LECSS-S/LECSS2-T) 1 LE C S

CQ2

37 37 41 U 85.5 93.5 103.5 A 38 38 42 U 83.5 91.5 101.5 A 30 30 34 U 87 95 105 A 33 33 37 U 81 89 99 A 32.5 32.5 36.5 U 80 88 98 125 140 160 2.3-107 Compact Cylinder/Long Stroke: Double Acting Single Rod Series CQ2 32, 40, 50, 63, 80, 100 How to Order A 32 200 DC CQ2 Standard DC A A73 S 32 200 CDQ2 With auto switch Number of auto switches With auto switch (Built-in magnet) S n Auto switch

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Number of auto switches S Nil 1 pc. Rotating angle 2 pcs. 90 180 270 90 100 90 180 270 90 100 Single vane S (1 auto switch) is shipped with a righthand auto switch. Nil (2 auto switches) is shipped with a right-hand and a left-hand switch.

Aluminum High Vacuum Angle Valve

0) Magnet (Option) "A" Pilot port S (for initial exhaust valve) Bellows holder !

ZP

S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Since S, Z and T types (with a power saving circuit) have a voltage drop due to internal circuit, do not exceed the following allowable voltage fluctuation range.

Series KV2 Fittings

Green Gray Tan S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S Color Indication Color S S S Color Black Red Green Blue White Yellow Orange Natural Silver Purple Brown Dk.

SFOD-OMT0009CN

/ LIN-I Step No. mm/s 1 2 2 2 mm/s mm/s / mm mm mm 1 LIN-A 100 200.00 1000 1000 0.0 0.0 0.5 2 LIN-A 100.00 0.0 0.0 0.5 0 3 LIN-A 100.00 0.0 0.0 0.5 2) 4 1) 1)LIN-I 2)LIN-A LIN-I 3 4 54 No.SFOD-OMT0009CN-B (4) CIR-R / CIR-L Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 1)CIR-R CIR-L

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

CL

Piston speed over 200 mm/s (When locking) 4. Immediately before a lock stop, drop the piston speed to 200 mm/s or lower by switching the speed controller (to the bypass circuit).

Auto Switch Guide

MK(2) RS Q G Auto switch Auto switch mounting bracket RS H A Set screw (M4) RZQ Mounting bracket (b) Tie-rod MI W S Auto switch mounting screw (With hexagon socket head) M5 x 0.8 CEP1 CE1 Auto switch CE2 Bracket set screw M5 x 0.8 x 12 l ML2B Mounting bracket (A) C J G5-S 1.

0.5

New New [mm] 300 2 s 4 s 6 s 8 s 0 300 Compact fan types 0 200 800 1600 2000 2400 Installation distance sPage 21 When neutralizing static electricity from 1000 V to 100 V at a distance of 300 mm from the workpiece (front surface). When air flow of IZF31 is maximum.

Title not found

Longrudinal mounlng space s rduced because there is no protrlsion from adtlshent bolts or nlernal shockabsorbeis sEe e pol J- a a a a a a a a a a a a a a a a MSo E Options " Except sEe 1, 2, 3,7, 10 and 20 2 pcs. 1 p c n pcs Body size a Lead wire length Eos.--l E s . I E s.

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 LIN -A 100 100.00 1000 1000 0 0 0.5 2 LIN -A 100.00 0 0 0.5 1 3 4 1 LIN -I 50 100.00 1000 1000 0 0 0.5 2 LIN -I 50.00 0 0 0.5 2 3 4 () 2 50mm/s 50mm 2 25mm/s Step2 Step1 100mm 2 71mm/s 100mm 1 43mm/s 100mm/s (00) 100mm 1 71mm/s