HRX-OM-X071

(Up to 150 records will be recorded.) 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XL-OMY0001

/ AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-

XL-OMV0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C

XL-OMY0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-

JXCx-OMT0001CN

JXC93Rockwell AutomationEtherNet/IP TM RSLogix5000 TM Rockwell AutomationRSLogix5000 TM module][New Module] [I/O Configuration][EtherNet/IP [Select Module][ETHERNET-MODULE Generic Ethernet Module][Create] -36No.JXC-OMT0001CN-C [Module Properties] (1)Name (2)Comm FormatConnection Parameters (3)IP AddressIP AddressJXC93 (4)Assembly Instance Decimal Comm Format "Data-SINT" Input 100 Output 150

modular-press-e

Applicable model ARG40(K) ARG30(K) ARG20(K) Option Bracket assembly Note 1) ARG40P-270AS ARG40P-260S GB4-10AS GB4-3AS GB4-P10AS GB4-P3AS ARG30P-270AS ARG30P-260S GB3-10AS GB3-3AS GB3-P10AS GB3-P3AS ARG20P-270AS ARG20P-260S GB2-10AS GB2-3AS GB2-P10AS GB2-P3AS ARG20P-270AS ARG20P-260AS ARG30P-270AS ARG30P-260AS ARG40P-270AS ARG40P-260AS Set nut Standard 0 to 1.0 MPa 0 to 0.3 MPa 0 to 150 psi

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

150 With auto switch CA1 Number of auto switches S n Bore size 20mm 25mm 32mm 40mm CS1 Air cylinder with auto switch 20 25 32 40 2 1 n Without auto switch (Built-in magnet) Auto switch * Refer to the left table for selecting applicable auto switches.

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

VP3145/3165/3185

Ambient and fluid temperature (C) Response time (ms) (1) (at the pressure of 0.5 MPa) 0 (No freezing) to 60 OFF AC 30 or less ON AC 30 or less DC 30 or less DC 40 or less Max. operating frequency (Hz) 3 Required (Equivalent to turbine oil Class1 ISO VG32) Lubrication (2) Yes (Non-locking) Manual override Mounting orientation Unrestricted 150/50 Note 1) Based on dynamic performance test, JIS

VSA4

Long service life (Over 20 million cycles) VHS Max. operating pressure Pilot air pressure Ambient temperature and operating fluid temperature 1.0 MPa 0.1 to 1.0 MPa 10 to 60C (1) Impact/Vibration resistance (m/s2) (3) Lubrication Not required (2) Dustproof (Enclosure class 0) (4) 150/50 Enclosure Note 1) Use dry air to prevent condensation when operating at low temperature.

VFR

or less 4.72 (4.55) VFR631 VFR630 39 0.17 9.3 39 0.15 9.3 3 4 (B) (A) 4 2 (B) (A) 4 2 42 [40] 0.12 [0.15] 9.6 [9.4] Exhaust center 4.72 (4.55) VFR641 VFR640 38 0.14 8.9 1 3 4 150 or less Pressure center 38 [20] 0.10 [0.44] 8.7 [5.7] 9.3 150 or less 4.72 (4.55) VFR651 VFR650 3 4 1 40 0.16 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 Pressure center Model Port size Type of actuation Effective area

VM

Inch size 1/4" 1/8" 5/32" Flow rate (l/min(ANR)) 170 100 120 150 IN OUT Effective area (mm2) 2.6 1.5 1.8 2.3 IN P1 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

Title not found

IDG60M, IDG100M are fitted with AMH micro mist separator with pre-filter. 1.77 3.53 5.29 Flow Flow Flow 10 25 50 100 200 300 500 600 750 1000 110 170 240 300 100 150 75 50 Single Type 76F (60C) Dew point Single Type 40F (40C) Dew point Single Type 4F (20C) Dew point 3.53 5.29 8.02 11.3 14.12 2.72 5.44 8.29 0.44 1.09 2.19 4.41 8.83 13.24 22.07 25.6 31.78 42.02 Model Inlet Model Inlet Model

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Manual operation) Pilot exhaust method Lubrication Mounting orientation Shock/Vibration resistance (m/s2) Enclosure 2 position single, double 3 position 2 position single, double 3 position Note 1) Non-locking push type, push-turn locking slotted type, push-turn locking lever type Individual exhaust for the pilot valve, common exhaust for the pilot and main valve Not required Unrestricted 150

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Uniaxial Electric Actuator Series LJ1

300 a=500 a=500 a=500 a a=1000 a=2000 a=1000 20 100 200 a=2000 a=2000 a=3000 L1 mm L1 mm L1 mm M1 W 10 50 100 L1 10 30 20 0 0 2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

length (Z) Height(H) Up to 36% reduction MY3A With rubber bumper Height (H) MY1B MY3A/3B MY3B With air cushion Height(H) (mm) Series 16 25 40 63 MY3A MY3B MY1B 27 37 54 84 MY1B With air cushion 37 54 84 116 Up to 53% reduction Max. 53% Weight Overall length(Z+Stroke) Z dimension Weight (kg) (mm) Series 16 25 40 63 Series 16 25 40 63 MY3A MY3B MY1B 0.34 0.87 2.95 8.26 MY3A MY3B MY1B 110 150

Mechanical Valves Series NVM, NVFM, NVZNI

Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

.Osrrc NVFI 10 seies 3 WaY'3 Port Direct Solenoid Operated Cv 0.055 (0-100 PSI); 0.05 (0 -150 PSI) Port Size 1/8" NPTF (Standard) High Speed Response Time 8mSec.