Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Lock: L (With Lock), Guide Pin Diameter: 080 (8.0mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: B (Opposite Direction of Port Side), Clamping Height: L (Low Type), Auto Switch: M9BV (Solid State, Gen. Purpose, 2 Wire, Vertical), Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (or None in the Case of No Switch), Made to Order: X2321

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG5Compressed air0.3 to 0.85 5 to 55 5 to 55 206250120.7252525

(Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

JAS

JAS Series How to Order Port size M3 M3 x 0.5 M5 M5 x 0.8 U10 10-32UNF JAS L E A 04 M5 JAS L E A S 04 01 Seal method Type L Elbow Nil Without sealant S With sealant Control type1 Port size E Meter-out S Meter-in 01 1/8 1 Meter-out and meter-in types can be visually identified by the color of the knob.

(Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 04 (1/2), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: Rc, Port Size: 04 (1/2), Output Specification: C (OUT1: NPN; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 04 (1/2), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket), Calibration

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: F (G), Port Size: 04 (1/2), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)