Pressure Sensor

C: Modified errors in text. [July 2016] D: Contents revised in several places.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection. When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch.

ZH

Recommended Sonic Conductance and Solenoid Valves (Reference) C [dm3/(sbar)] ZH10--X185 1.48 or more ZH20--X185 3.12 or more ZH30--X185 5.92 or more ZH40--X185 11.08 or more Model VQZ200 VP300 VP500 VP700 Solenoid valve (Reference) Sonic conductance C [dm3/(sbar)]: 1.7 Sonic conductance C [dm3/(sbar)]: 4.2 Sonic conductance C [dm3/(sbar)]: 8.9 Sonic conductance C [dm3/(sbar)]: 15.3 791 C

HRX-OM-S004

Press the 2 sec.

HRX-OM-W032

Press the 2 sec.

AW20-B to AW60-B

) + Nil Without auto drain b Float type auto drain C Note 6) N.C.

8

(Refer to Fig. (1) and (2).) E: Emitter C: Collector B: Base B: Base E: Emitter C: Collector Fig. (1) NPN type Fig. (2) PNP type 16-13-4 12 Glossary of Terms U Reversed output mode Refer to Hysteresis mode and Window comparator mode in Technical Information on page 16-13-8. Unit conversion Refer to Technical Information on page 16-13-13.

Precision Clean Regulator

2 1 Body Stainless steel 316L 2 Valve guide Stainless steel 316 ARM 3 Spacer PPS e !1 ARP 4 Bonnet PPS 5 Knob PBT IR-A i o Electroless nickel plated 6 Set nut ZDC 7 Valve spring Stainless steel 316 IR 8 Main valve Ceramics !

Electro-Pneumatic Regulator IT1000/2000/4000

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

EXxx-OMY0006CN

SI No. 1 COM M OUT 1 COM 0V 2 3 P OUT 1 Zone 1 4 SOL 0 0 Zone 1 ON Zone 1 11 SOL 7 7 Zone 1 ON 12 P OUT 2 Zone 2 13 SOL 8 8 Zone 2 ON Zone 2 20 SOL 15 15 Zone 2 ON 21 P OUT 3 Zone 3 22 SOL 16 16 Zone 3 ON Zone 3 29 SOL 23 23 Zone 3 ON 30 N. C. N.

EXxx-OMO0027

EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input unit EX600-AXA 4 (2 byte/1 channel) 0 (2 channels) (2 channels) 0 4 Analogue output unit EX600-AYA (2 byte/1 channel) Analogue I/O unit EX600-AMB 4 4 (2/2 channels) (2 byte/1 channel) (2 byte/1 channel) -62No.EX-OMO0027

Fieldbus system PROFIBUS DP compatible SI unit

System diag.2 7 6 5 4 3 2 1 0 Byte 8 Bit No.

IDX-OM-W089

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions about reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term

Fieldbus system EtherNet/IP TM compatible SI unit

EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input Unit EX600-AXA (2 channels) 4 (2 byte/1 channel) 0 Analogue output Unit EX600-AYA (2 channels) 0 4 (2 byte/1 channel) Analogue I/O Unit EX600-AMB (2/2 channels) 4 (2 byte/1 channel) 4 (2

EXxx-OMN0027CN

0.70.8 Nm (EX600-ZMA2) (EX600-ZMB2) (3)DIN DIN (4)DIN (5)M4X20(EX600-ZMA2) 0.70.8 Nm DIN DIN (EX600-ZMA2) 6 -14No.EX-OMN0027CN-D M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180 (1) (2) (3) A B C (EX600-ZT1) -15No.EX-OMN0027CN-D SI EX600-S A SI 1 PNP(-COM) 2 NPN(+COM) PR PROFIBUS DP No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 11 (BUS IN) 12 (2

CLK1

Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...) A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

EXxx-OMN0035CN

DIN (SY SY ) (1) 6 ,2 (M4X5)DIN (EX600-ZMB2) EX600 0.70.8 Nm (2)2 M4X14EX600-ZMA2 0.70.8 Nm (3)DIN DIN (4)DIN DIN (5)M4X20(EX600-ZMA2) 0.70.8 Nm -13No.EX-OMN0035CN-A M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180(1/2) (1) (2) (3) A B C D-sub (1) (2) (3)2 0.6 Nm -14No.EX-OMN0035CN-A -15No.EX-OMN0035CN-A () 2.5 mm0.4 mm 0.081.5 mm 2(AWG1628) 56 mm EX600-ZT1 -16No.EX-OMN0035CN-A

High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20

High Vacuum L Type Valve

SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.