6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-WWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RH?

EXxx-OMV0028.eng

Tightening torque: 0.7 to 0.8 Nm 2 4 5 10 Thank you for purchasing an SMC EX600-WPN# SMC Wireless System. Please read this manual carefully before operating the product and make sure you understand its capabilities and limitations.

PFM3.eng

Selection of connected sensor [ 10] 10 L/min (PFM510) [F 0] [Un i] Unit selection function [ L] L/min The zero clear function has been performed while the fluid is flowing. "Er4" will be displayed for 1 second. Perform the zero clear function again under no flow conditions. Attaching the connector to the sensor wire Strip the sensor wire as shown. Do not cut the insulator.

PSxx-OMG0005CN

10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12 V ) 1 k (25 ) 1F.S.() 3F.S.() 0.5F.S. 0.2F.S. 0.3F.S.

(2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series). Having the amplifier built into the electro-pneumatic pilot valve, only an external (24V DC) power supply and (1 to 5V DC) signal voltage need to be connected making handling simple.

to 35C), 35 to 80%RH (no condensation)Clear water50 to 140F (10 to 60 C) (no condensation)600 W Note 2)900 W Note 2)?

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ001-HWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-40/GALDEN?

)Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ001-L1Water-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution of 60% ethylene glycol?

to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 401.0 (at 20C)0.90 (at 20C)?

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ001-LWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-3283/GALDEN?

)Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ004-L1Water-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution of 60% ethylene glycol?

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g