Power Clamp Cylinder

VD0.05 PA0.02 PC0.05 GC +0.1 K 0 PB0.02 GA GB VF LA0.1 VA0.02 C VE L 2 x 2 x P H7 depth D 2 x V H7 depth I 4 x NN depth S N 2 x NPT 1/4 G 2 x 2 x MM depth J Hexagon socket head plug 2 x NPT 1/4 G E B RB (mm) Bore size (mm) 50 63 80 C D E GA GB GC I J K L LA LB MM N NA NB NC NN P B 95 48 12 13.7 134.3 138.5 93 10 12 55 376.4 149.5 78.4 M10 x 1.5 19 13 36.5 10.3 M8 x 1.25 10 112 54 12 16.6

5 Port Solenoid Valve Series SV

14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Model 4, 2 (A/B) 1, 5, 3 (P/EA/EB) C[dm3/(sbar)] C[dm3/(sbar)] Cv Cv b b C6 SS5V1-16 C8 0.89 0.22 0.23 0.22 0.21 0.98 C8 SS5V2-16 C10 2.3 0.50 0.56 0.28 0.18 2.7 Note) Value is for manifold base with 5 stations and individually operated 2 position type.

LEC-T1_C

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 5 - LEC-T1 Series/ / 3) *3) 1 1 1.5 1 () 6 - TB Ver.

Digital Flow Switch ( compatible)

Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PF2MC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket With mounting screws for PF2MC7202 (M3 x 5, 2 pcs.)

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

VZ100/300/500

Cv b Cv 1 2 (P A) 2 3 (A R) Model Flow characteristics Note) Type of actuation Port size Weight (g) Base mounted VZ512 VZ522 VZ514 VZ524 VZ514 VZ524 N.C.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

High Vacuum L Type Valve

30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

HS Auto switch 36 12 24.5 SMC SMC A 33 B Auto switch 49.5 A B G 1/2 (applicable cable O.D. 6.8 to 11.5) Proper auto switch mounting positions (mm) D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, D-A34 D-A44 D-B5 D-B6 D-G5NTL D-H7F D-B59W Bore size (mm) A A B A A A A B A B B B B B 20 14 10 8.5 12 10.5 14 9 15 13 12 6.5 8.5 12 7 25 14.5 12.5 9.5 9 11 14.5 9.5 12.5 15.5 11.5

Electric Actuator / Guide rod Slider

This matches the controller. (2) Check Parallel I/O configuration matches (NPN or PNP). (1) LEL25LT-300 NPN (2) -11- 2.3 Construction 11 8 Motor option with motor cover Motor option with lock 24 3 6 2 4 1 14 22 12 17 13 17 7 B A-A(LEL25LT-) A-A(LEL25MT-) B 19 19 23 5 21 20 16 9 10 15 18 No.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

) COM (Black) 12 Point output A 13 Point output B A phase (Orange) a phase (Blue) B phase (Red) b phase (Yellow) Point output C 14 15 Point output D READY output 16 2 phase stepper motor BUSY output 17 + Return to origin complete 18 1 2 3 24VDC 24V 0V FG Alarm output 19 N.C 20 Interface connector input/output signal details Power connector input/output signal details Connector no.

Fieldbus system (CC-Link compliant)

SW2 Number of point controlled by COM port occupied Mode available number No.2 No.3 No.4 INPUT OUTPUT station of I/O point 3 occupied stations Input: 64/ Output: 64 ON OFF OFF 16 points for each 16 points for each of A to D of A to D 2 occupied stations A mode Input: 32/ Output: 32 OFF ON OFF 16 points for each 16 points for each of A and B of A and B 2 occupied stations B mode Input: 32/

VK3000

Flow characteristics Operating pressure range (MPa) Weight (g) 4/2 5/3 (A/B R1/R2) Port size 1 4/2 (P A/B) Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.12 0.10 0.10 0.10 0.12 0.37 0.33 0.34 0.38 0.12 0.43 0.40 0.40 0.35 0.54 0.12 0.19 0.09 0.11 0.14 0.37 0.10 0.30 0.11 0.10 M5 x 0.8 0.45 0.84 0.38 0.48 0.63 VK3120 Used as a 3 Port Valve 1 8 Body ported 90 VK3120Y (For

Fieldbus system Analog unit

Number of input channels output channels B 4xM12 connector (5 pin) 2 channels 2 channels : An M12 connector (4 pin) can also be connected.

Soft Start-up Valve

Flow Rate Characteristics Series AV2000-A AV3000-A AV4000-A AV5000-A Port size 1(P), 2(A) 1/4 3/8 1/2 3/4 1 3(R) 1/4 3/8 1/2 3/4 1(P) R 2(A) C[dm3/(sbar)] 9.2 13.1 19.2 34.8 41.3 b 0.36 0.27 0.32 0.66 0.34 Cv 2.4 3.1 5.1 12.6 13.7 Flow rate characteristics 2(A) R 3(R) C[dm3/(sbar)] 8.8 9.2 10.1 23.7 b 0.46 0.48 0.55 0.67 Cv 2.5 2.6 3.2 9.2 Pressure for switching from low speed air supply

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20*2 Nil Without option B With lock Size Stroke 100 200 300 400 500 600 25 V V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS

Speed Controller with Indicator

Note 2) Use 1/8" tubing.

HRX-OM-W002

2 2 1 1 1 3 2 3 2 1 1 4 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL

VNB

C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Changing from N.C. to N.O.