EX510

Accessory Dimensions 25.7 64 16 54 0.2 5 70 0.2 5 PWR (V) 40 BUS PWR 80 OUTPUT INPUT Cover view 2 x M4 Mounting hole OUTPUT INPUT COM D 60 COM C COM B COM A 1702

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Option Manifold Plug-in unit 1 Option None Symbol Nil Stations 10 Clean series 2 B Note 2) D D0 D Note 5) K Note 3) N R Note 4) 200/220 VAC models (F/L kit only) With back pressure check valve DIN rail mounting With DIN rail bracket (Without DIN rail) With ejector unit Special wiring spec.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

Bore sizes 32 to 63 are available for the D-P3DWA. Since there are other applicable auto switches than listed, refer to page 515 for details. For details about auto switches with pre-wired connector, refer to pages 1192 and 1193.

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

Normally closed (NC = b contact) solid state auto switches (D-Y7G/Y7H types) are also available. Refer to page 961 for details. Auto switches are shipped together (not assembled).

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

MHZA2-6/MHZAJ2-6

Parallel Style Air Gripper (Standard) Compact Series (Without Auto Switch) Series MHZA2-6/MHZAJ2-6 How to Order MHZA 2 6 D MHZAJ 2 6 D Made to Order Refer to page 389 for details.

S

U side Base mounted plug-in 3 1 2 Stations D side 9

Series VS

Series VS R8 S HOW TO ORDER ISO5599/2 VALVE MANIFOLD VV8 2 5 03 TU1 03 D T W1 W1=NEMA 4 ISO Size 1 Size 1 Port Thread Code 2 Size 2 3 Size 3 NIL Rc (PT) T NPTF F G(PF) Location of port 1(P), 5(EA), 3(EB) Number of Stations D D side 2 2 stations U U side B Both side 9 9 stations Size of port 1(P), 5(EA), 3(EB) Symbol Size Applicable ISO size 02 1/4 Size 1 U side option 03 3/8 Size 1

VXF2

Valve Type Diaphragm/Main valve material Class B Coil insulation type Piping Material With/without silencer Voltage Electrical entry Port size Symbol Port size With/without silencer Diaphragm/ Main valve material Symbol Electrical entry Voltage Piping Symbol Symbol A B 1 2 3 4 20A NBR/POM Without Grommet 25A NBR/POM A With A Direct piping type 40A 24 VDC 50A A B Direct piping type B C D

ZSE20(F)_ISE20

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7

Process valve series VNC, Air operated type, Orifice size: 7mm to 80mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, VNA/B/C/D BODY PT >3/4, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, LA, VNA/B/C/D BODY PT >3/4

D??D?D?DD

Process valve series VNC, Air operated type, Orifice size: 7mm to 80mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, VNA/B/C/D, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 3.5754 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, VNA/B/C/D, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 18.40859 lb

/B/C/D BODY PT 1/2, 0.74319 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, VNA/B/C/D, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 4.85016 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, VNA/B/C/D, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 4.65726 lb

and external pilot solenoid types., VNA/B/C/D, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 4.29901 lb

Process valve series VNB, Air operated type, Orifice size: 7mm to 50mm, Port size: 1/8 to 2 Rc(PT), Seal material: NBR, FPM, EPR, VNA/B/C/D, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D, 16.1558 lb