Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -

Parallel I/O Type: PNP, I/O Cable Length, m: No Cable, Option: DIN Rail Mounting, DIN Rail not Included, Table Accuracy: Basic, Size: 10, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Parallel I/O Type: PNP, I/O Cable Length, m: 3, Option: Screw Mounting, Table Accuracy: Basic, Size: 10, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Parallel I/O Type: NPN, I/O Cable Length, m: 5, Option: Screw Mounting, Table Accuracy: High Precision, Size: 50, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Parallel I/O Type: NPN, I/O Cable Length, m: 1.5, Option: Screw Mounting, Table Accuracy: Basic, Size: 10, Max. Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 180°

Parallel I/O Type: NPN, I/O Cable Length, m: No Cable, Option: Screw Mounting, Table Accuracy: Basic, Size: 10, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Parallel I/O Type: NPN, I/O Cable Length, m: No Cable, Option: Screw Mounting, Table Accuracy: Basic, Size: 30, Max. Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 180°

Parallel I/O Type: NPN, I/O Cable Length, m: No Cable, Option: Screw Mounting, Table Accuracy: High Precision, Size: 50, Max. Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 180°

Parallel I/O Type: PNP, I/O Cable Length, m: No Cable, Option: Screw Mounting, Table Accuracy: High Precision, Size: 50, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Parallel I/O Type: PNP, I/O Cable Length, m: No Cable, Option: Screw Mounting, Table Accuracy: High Precision, Size: 50, Max. Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 180°

Parallel I/O Type: NPN, I/O Cable Length, m: 3, Option: DIN Rail Mounting, DIN Rail not Included, Table Accuracy: Basic, Size: 10, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Parallel I/O Type: NPN, I/O Cable Length, m: 5, Option: DIN Rail Mounting, DIN Rail not Included, Table Accuracy: High Precision, Size: 50, Max. Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 180°

Parallel I/O Type: NPN, I/O Cable Length, m: 5, Option: DIN Rail Mounting, DIN Rail not Included, Table Accuracy: High Precision, Size: 10, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Parallel I/O Type: PNP, I/O Cable Length, m: 1.5, Option: DIN Rail Mounting, DIN Rail not Included, Table Accuracy: Basic, Size: 10, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Parallel I/O Type: PNP, I/O Cable Length, m: No Cable, Option: DIN Rail Mounting, DIN Rail not Included, Table Accuracy: Basic, Size: 50, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Parallel I/O Type: NPN, I/O Cable Length, m: 3, Option: DIN Rail Mounting, DIN Rail not Included, Table Accuracy: Basic, Size: 50, Max. Rotating Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: External Stopper: 180°

Table Accuracy: High Precision, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 180°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Robotic Type Cables, Flexible Type, Actuator Cable Length: 5, Controller: Step Data Input Type, PNP, I/O Cable Length: 5, Communication Plug Connector: None, Controller Option