Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

Body Size: -, Thread: -, Port: -, Option: -, Attachment: -, Semi-Standard 1: -, Semi-Standard 2: -

XL

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

Cylinder with Lock

n = 4, 8, 12, 16)*2 100 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 115 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 75 80 95 105 110 D-A5m D-A6m n 75 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 105 + 55 (n 4) 2 (n = 4, 8, 12, 16)*2 110 + 55 (n 4) 2 (n = 4, 8, 12

NCA1

) Bore (in) MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE F G J S WF Y P LF SA XA ZA 150 (1.5) 5/8 7/16-20 3/4 2.02 3/8 2 3/16 1 3/16 1 7/16 1/8 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 1 1/4 1 1.71 2.36 3 5/8 6 5 5/8 6 1/16 200 (2) 5/8 7/16-20 3/4 2.6 3/8 2 11/16 1 7/16 1 9/16 1/8 1 1/8 1 1/8 3/8 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 1 3/4 1 1.71 2.4 3 5/8 6 5 5/8 6 3/16 250

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

8 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

8 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

30 to 300 mm/s 30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.

VFR

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% System Components Solenoid valve System Silencer Speed controller SPG (Steel pipe) dia. x Length 10A x 1 m Series VFR4000 Rc 3/8 Series VFR4000 Rc 3/8 AS4000-03 (S = 21 mm2) AN300-03 (S = 60 mm2) A AS420-03 (S = 73 mm2) 10A x 1 m AN300-03 (S = 60 mm2) B 15A x 1 m Series VFR4000 Rc 1/2 AN400-04 (S = 90 mm2) AS420-04 (S = 97 mm2) C