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Since the PTFE seal is used for element e, a certain amount of force is needed to set the element. Set the element in the following procedure. Handle element e carefully to keep it clean, for example, open the element package only when the element is mounted. a. Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q.

(Port indication: P: supply port; V: vacuum port; E: exhaust port.) Matching the ejector to the vacuum circuit Refer to technical data on page 13-110 to 19 for precautions on the vacuum circuit.

L/min w e L t Unit display of flow rate for air/ Red (PF2A200, 201 for air only) CH1 to 4 will illuminate when the normal condition (nor) is selected. e OUT1 CH y Unit display/Orange Illuminates the selected unit.

1 towards the right, and the pressure at the right side of top diaphragm e decreases, causing top diaphragm e to move to the right. Then, valve y moves away from the left surface of top diaphragm e, the outlet pressure flows from port A via the valve hollow and is discharged through port (atmosphere).

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

The power supply for control and input, or the input device, is Off. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 DX E/DX F DY B/DY E/DY F Content Content Content DM E/DM F ST: STatus display LED ST: STatus display LED ST: STatus display LED

C ircuit(1 ) C ircuit(2 ) Pilot valve set K T PA 5 3 8 NBR diaphragm set K T PA 3 3 2 PT F E diaphragm set K T PA 3 3 1 S w itching valve assembly set K T PA 3 3 6 A ctuator parts set K T PA 3 3 7 4 . Maintenance 3 . How to use Warning E nvironment When using hazardous fluid, take measures to keep people aw ay from the pump.

Wire core size AWG24-26 (0.14 to 0.2mm) AWG24-26 (0.14 to 0.2mm) AWG20-22 (0.3 to 0.5mm) AWG20-22 (0.3 to 0.5mm) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 1.4 to 2.0 PSE521 1.0 to 1.4 PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. Brown Black Blue N.C. 1 2 3 4 F.G.

L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, TIE ROD, FINE LOCK, A-SW, ACTUATOR, CLA/CLA2 TIE-ROD CYLINDER, PE, 63MM CLA DBL-ACT AUTO-SW, .00000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size and mounting) , Auto switch capable, CYL, TIE ROD, FINE LOCK, A-SW, ACTUATOR, CLA/CLA2 TIE-ROD CYLINDER, PE, 63MM CLA DBL-ACT AUTO-SW

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, CYL, TIE ROD, FINE LOCK, A-SW, TIE ROD CYLINDER W/LOCK, 409, 6.06160 lb

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

1 upward, the pressure at the top surface of piston e decreases, causes piston e to move upward, opens poppet valve (exhaust) y via shaft u, and is discharged through port 3(R) to the atmosphere.

8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Parts list No. Description Parts list No.

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, CYL, TIE ROD, LOCKING, ACTUATOR, CNA/CNA2 POWER LOCK CYLINDER, PE, 63MM CNA DBL ACTING, AUOT-SW, 12.56634 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, RND BODY, DBL ACTING, ACTUATOR, CM2/CM3 ROUND BODY CYLINDER, HE, 20MM CM2 DBL-ACT AUTO-SW, .73016 lb

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !