Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C8 (ø8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

SI unit for CC-Link

Element Description 1 Communication terminals (DA, DB, DG) To connect the CC-Link line with a CC-Link-dedicated cable. 2 Power supply terminals (24 V, 0 V) To supply power to solenoid valves. 3 Power supply terminals (+24 V, 24 G) To supply power to the SI unit controller. 4 FG terminal To connect to functional ground. 5 Display LED display to indicate the status of the SI unit. 6 Switch

Type, Vacuum Pressure Sensor: D (Digital Vacuum Pressure Switch), Output Specifications: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specifications: P (w/Unit Switching Function, Initial Value psi, Not for Use in Japan)

I

I ll lir r i I l l l + r EtacK ^^ DC Lamp, Surge Voltage Supffessor Circuit z *"o",.ioffiJl-l|= *-ilEll-l'" EZ, TZ, DZ EZ, rZ, DZ {1@V or more) (Less tban 24V) Electrical Connection Use As A 3 Port Valve a For the DIN connection and Terminal connection (with surge voltage protection circuit), inner connections are as follows.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Electrical entry AC (50/60 Hz) DC 100, 200, 110, 220, 240 24, 12 10% of rated voltage Coil rated voltage (V) Allowable voltage fluctuation 1.55 (With indicator light: 1.65) DIN/Conduit terminal with indicator light: 1.7 1.5 Note) AC Apparent power (VA) Without indicator light Note) Power consumption (W) DC With indicator light 1.55, DIN/Conduit terminal with indicator light: 1.75 A rectifying

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C8 (ø8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: None, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: D (Push-turn Locking Slotted Type), Vacuum Pressure Sensor: None, Output Specifications: V (PNP Open Collector

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

PFG3x.eng

Internal circuit and wiring examples NPN open collector 2 output + Analogue output Max. 30 V, 80 mA Residual voltage: 1 V or less Safety Instructions button Decreases mode and ON/OFF set values. Flow range setting Press the or button to select the flow range. button Press this button to change mode and to confirm settings. Unit display Indicates the units currently selected.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

ACG

ACG20 to 40 AF + ARG + [S] + AL (7) Pressure switch S AF + [S] + ARG ACG20B to 40B ACG20C to 40C AF + AFM + [S] + ARG ACG20 to 40 AF + ARG + AL + [V] Residual pressure relief 3 port valve AW + AL + [V] ACG20A to 40A Port size AF + ARG + [V] V ACG20B to 40B Body size Port size ACG20C to 40C AF + AFM + ARG + [V] Symbol 20 30 40 AW + AFM + [V] ACG20D to 40D 01 02 03 04 1/8 Note 6) When more

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?3C)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.