LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Clean Exhaust Filter

Note 6) Due to the softness of polyurethane tubing, it may fold when being inserted.

Air Tank Series AT 1

9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF)

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MXS6-PS 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS !7 !8 !9 Piston seal MXS8-PS Rod seal NBR MXS12-PS Set of left nos. !7, !8, !9 O-ring MXS16-PS With end lock MXS20-PS MXS25-PS #2 #3 #4 #5 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

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I TV2O M 00068B 12

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PSxx-OMT0005CN

-2No.PS-OMT0005CN-A / 1 1.5 *3) *3)1 1 [] -3No.PS-OMT0005CN-A () () () () -4No.PS-OMT0005CN-A () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMT0005CN-A * (Nm) R1/4 812 (50N () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMT0005CN-A * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMT0005CN-A 7 02 PSE57 / M12(3m) 5 (02MPa) L M12(3m) 6 (05MPa) N 7 (010MPa) (1~5V)

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6 !7 !8 !

AF800/900

rate (l/min(ANR)) Auto-drain 00 10 11 None 6 72 Float style auto-drain (N.C.)

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

Clean Rodless Cylinder Series CYP

14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position "Nil".

FEP Tubing (Fluoropolymer) Series TH

(mm) 4 4 6 8 10 10 12 12 Tubing I.D. (mm) 2 4 6 10 2.5 7.5 8 9 Color Symbol N Translucent R Red (Translucent) BU Blue (Translucent) B Black (Opaque) Inch nominal size Inch nominal size 5/32" 5/16" Specifications Air, Water Note 1), Inert gas Note 4) Fluid How to measure the minimum bending radius.

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The 11/22-MXP clean room, high precision slide tables have travelling parallelism of 0.004 mm for all its bore sizes and non-rotating accuracy +/-0.03° for 6 and 10 mm bore sizes and non-rotating accuracy +/-0.04° for 12 and 16 mm bore sizes.

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AKB/AKH CHECK VALVES Available with One-Touch Fitting; Bushing Type and Straight Type; Applicable OD in metric: 4, 6, 8, 10, 12 and in imperial: 5/32, 1/4, 5/16, 3/8, 1/2. ASD DUAL SPEED CONTROLLER ZFC VACUUM FILTER Inline Type with One-Touch Fittings; Applicable Tube Sizes Metric: 4, 6, 8mm; Imperial: 5/32, 1/4 5/16; Cartridge Type allows Element Replacement.

ZSE3/ISE3

Apply atmospheric pressure and then reset the switch. 16-4-5 6 Series ZSE3/ISE3 How to Replace Filter Element Replace the filter element when clogging causes deterioration of the adsorption force or slow response time. (Element part number: ZX1-FE) Confirm that the filter gasket is seated in the groove and then reassemble the parts.

Modular Type Regulator Series AR

Note 6) Refer to P/A catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch.

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I 28.57 1,14.1 2t 6 , 1 2 Reference torque sDecification Table #4 Male Branch "Y': KVU'* " Not avgileble El lim6 ot calEl prtnfng.

Dual-Rod Cylinder Series CXS

CXSJ 6, 10 Standard Type Series CXS 6, 10, 15, 20, 25, 32 New New With Air Cushion Series CXS 20, 25, 32 W With End Lock Series CXS 6, 10, 15, 20, 25, 32 Dual-Double-Rod Type Series CXSW 6, 10, 15, 20, 25, 32 Auto Switches Made to Order

Series LQ3 High Purity Fluororesin Fitting

F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.