High Vacuum Angle Valve, XL Series

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

LEY-OM007

SET DATA SET 4.3 [] P21~P29 0mm 20mm 1 No. 1 20.00mm 250mm/s 1 No. 1 0.00mm 250mm/s MENU 20 SET -8- 2.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

= 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 15 75 90 100 110 D-A9l n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16)

7

. 146 Pilot Operated 2 Port Solenoid Valve VXD Series Air Air Oil Water Dimensions/VXD2 /2 /2 Body Material: CAC408 7 E 8 F 9 G Conduit terminal (V2) (U2) E C 32 VX2 25 T B VXK G1/2 R VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical

C85

2-LD D D SW C KK ND B LH K NA LX AM NA 3 N1 N2 L S + Stroke H ZZ + Stroke Head cover Y Head cover F (mm) NA Bore KK ZZ AM B C D EE G1 G2 H K L LD LH LX N1 N2 ND h8 S SW WH XB 0 0.033 0 0.033 20 20 8 28 106 20 G 1/8 30 6 15 21 76 13 10 22 33.5 30.3 22 8 M8 x 1.25 29 15 24 5.5, 9.5 depth of counterbore 6.5 25 26 10 33.5 115 22 G 1/8 36 8 18 25 79 17 14 26 36.6 22 8 29 15 30 39 M10 x 1.25 6.6

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

For details, refer to page 8-30-31. MXP10 MXP6 MXP12 MXP16 8-8-22 22 Precision Air Slide Table Series MXP8 8 How to Order MX MXP 8 10 M9N S MTS MY Precision air slide table Number of auto switches Nil 2 pcs.

JIS Standard Hydraulic Cylinder

+ Stroke Y1 X1 BB Z + Stroke Width across flats G ZZ + 2 strokes (mm) Bore size (mm) Stroke range (mm) B BB GA LX P LW LT F J LH NA T SS S Z X1 C Y1 R M CD 32 25 to 800 M10 x 1.25 32 39 30 37 222 40 3/8 8 40 11 32 11 220 158 16 11 38 58 62 13 0.15 0.13 40 25 to 800 32 M10 x 1.25 33 42 36 222 46 3/8 43 8 11 32 220 11 12 158 45 11 69 65 13 50 25 to 800 M10 x 1.25 40 46 37 43 246 58 1/2 8 50

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-14-8 8 Mechanically Jointed Rodless Cylinder Series MY3A/3B Cushion Capacity Absorption Capacity of Rubber Bumper (MY3A) Horizontal impact: P = 0.5 MPa MY3A16 Horizontal impact: P = 0.5 MPa MY3A25 1000 1000 MX 500 500 Impact speed mm/s Impact speed mm/s Rubber bumper Rubber bumper MTS 400 400 300 300 MY 200 200 CY MG Courtesy of Steven

CRQ2

In addition to Rc 1/ 8, G 1/ 8, NPT 1/ 8, NPTF 1/ 8 are also available. S: Upper space 90, Lower space 180 11-8-7 8 Series CRQ2 Rotation Range When pressurized from the port indicated by the arrow, the shaft will rotate in a clockwise direction.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

MQQ

39 48 RS H A 20 10 to 60 79 99 6.6 8 42 52 FT FX 25 10 to 50, 75, 100 84.5 106.5 5.5 8 48 56 L B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55 18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke

MQQ

20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT FX FZ H 2-FC S + Stroke ZZ + Stroke D-X 20Bore size (mm) FC FT FX FY FZ H ZZ S Data 10 5.5 2.3 33 20 42 28 101 65 16 5.5 2.3 42 24 54 30 114 74 20 7 4 60 34 75 40.5 151 97.5 25

Booster Regulator/Air Tank

port Rc 3/4 (A) D (B) OUT OUT 355 ITVH 256 256 205 4 x 13 4 x 13 ITVX 50 50 150 150 500 PVQ 250 250 824 (mm) VY1 Drain port Rc 1/4 A 531 570 494 527 576 B 444 479.8 444 479.8 479.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 1/2 D Note) 519 543 Booster regulator model VBA20A VBA40A VBA22A VBA42A VBA43A VBA VBAT VBA VBAT AP100 Note) When option G (pressure gauge) is selected 20 38 R S 05 10 R S VBAT

MGG

Dimensions Basic type 20 to 40 4-F through, counter bore G Bottom 4-H Rc 1/8 front cylinder port Rc 1/8 rear cylinder port N 4-O Rc 1/8 unlocking port D M C Unlocks when pressurized AE GR GK GL GQ GC T S E U W K L B Width across flats XA Width across flats 12 PG AP I Unlocking cam Element AA Q R PL J V X A AB Y + Stroke Z + Stroke AD AC 8-AF For standard strokes (mm) Stroke range (mm) Bore

CNG

J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 26 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 103 1/8

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50

PF2A/PF2W

or less 2% F .S. or less 0.35 to 4.5 l/min 0.35 to 4.5 l/min 0.5 to 4 l/min 0.05 l/min 0.05 l/pulse 3.5 to 45 l/min 3.5 to 45 l/min 5 to 40 l/min 0.5 l/min 0.5 l/pulse 7 to 110 l/min 7 to 110 l/min 10 to 100 l/min 1 l/min 1 l/pulse IF Data 5% F .S. or less 3% F .S. or less 5% F .S. or less (0 to 50C, based on 25C) 70 mA or less 80 mA or less 460 g 3/8 700 g 1/2, 3/4 520 g 3/8, 1/2 1150 g

REC

K MM N NA NN P S ZZ Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x 1.25 M20 x 1.5 Up to 700 18 15.5 13 26 8 20 13 10 41 5 8 33.5 5 20 30 1/8 146 200 25 M10 x 1.25 M26 x 1.5 Up to 700 22 19.5 17 32 10 26 13 10 45 6 8 37.5 5.5 20 34.5 1/8 146 204 32 M10 x 1.25 M26 x 1.5 Up to 1000 22 19.5 17 32 12 26 13 11 45 6 8 46.5 5.5 22 42.5 1/8 159 217 40 M14 x 1.5 M32 x 2 Up to 1000

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 4 2 . 1 ) 5 . 1 3 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 8 3 . 1 ) 5 3 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 2 3 8 / 3 S 6 3 1 1 T R K 4 2 . 1 ) 5 . 1 3 ( 4 4 . 1 ) 5 . 6 3 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 T R K 7/8 ) 3 2 . 2 2 ( 0 4 . 1 ) 5 . 5 3 (