5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38

3.5, 2 m4 cores (A.B) Conductor area: 0.15 mm2 (AWG26) 5 cores (R.T.S.V) Insulator O.D.: 0.95 mmCE marking, UL/CSA, RoHS compliance

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

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5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?

5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?

5 to 120/5 to 50Slide screw + Slide camLinear guide (No circulation)?0.02?0.051.0 or less150/30605 to 4090 or less (No condensation)1120? 42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

3.5, 2 m4 cores (A.B) Conductor area: 0.15 mm2 (AWG26) 5 cores (R.T.S.V) Insulator O.D.: 0.95 mmCE marking, UL/CSA, RoHS compliance

3.5, 2 m4 cores (A.B) Conductor area: 0.15 mm2 (AWG26) 5 cores (R.T.S.V) Insulator O.D.: 0.95 mmCE marking, UL/CSA, RoHS compliance

3.5, 2 m4 cores (A.B) Conductor area: 0.15 mm2 (AWG26) 5 cores (R.T.S.V) Insulator O.D.: 0.95 mmCE marking, UL/CSA, RoHS compliance

3.5, 2 m4 cores (A.B) Conductor area: 0.15 mm2 (AWG26) 5 cores (R.T.S.V) Insulator O.D.: 0.95 mmCE marking, UL/CSA, RoHS compliance

SERIES, IA, OTHER 5/16, .00000 lb

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g