Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available REGULATOR, PRECISION.

AR MASS PRO 1" MODULAR (PT). 2.69336 lb. HA.

AR MASS PRO 1" MODULAR (PT). 2.866 lb. HA.

AR MASS PRO 1" MODULAR (PT). 2.70432 lb. HA.

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

MHC2

MHC2-16 MHC2-10 MHC2-20 MHC2-25 !8 !9 NBR MHC10-PS MHC16-PS MHC20-PS MHC25-PS Seal kit @0 @1 2.6-5

Series HAW Water Cooled Aftercooler 1

270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7