C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

RB/RBL/RBQ

15 15 20 25 33 13.9 16.2 21.9 31.2 41.6 10-18-3 4 Shock Absorber Series RB Series RB/ Shock Absorber Technical Data: Model Selection 1.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Flat ribbon cable connector SOL.A () (+) 20 1 station SOL.B () 18 (+) SOL.A 20 19 () 16 (+) 2 stations SOL.B 18 17 () 14 (+) 16 15 SOL.A 12 () (+) 3 stations 14 13 SOL.B () (+) 10 12 11 SOL.A 8 () (+) 10 9 4 stations SOL.B () 6 (+) 8 7 Connector terminal no.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

10 15 15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Compact Manifold Regulator

IN Fitting Type Inch size Metric size ARP Common supply block (S) Common supply block with pressure switch (P) Fitting type Fitting type Straight 6 8 10 8 6 10 Elbow Straight 1/4 5/16 3/8 5/16 1/4 3/8 Elbow Symbol Symbol IR-A 01 02 03 13 14 15 51 52 53 63 64 65 5 56 56 5 IR 0.4 0.2 0.6 0.5 SMC 20 MPa 24 20 17 24 56 IRV 0.3 0.1 VEX 32.5 SRH 4.

25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

Non-contact Gripper

8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size: 80 Size: 100 30 50 0.4 (MPa) 0.4 (MPa) 25 40 0.3 (MPa) 0.3 (MPa) Lifting force (N) Lifting force (N) 20 30 0.2 (MPa) 15 0.2 (MPa) 20 10 0.1 (MPa) 0.1 (MPa) 10 5 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

150 to 1000 150 to 700 150 to 700 10 8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21 19.5 19.5 15.5 55.5 49.5 45.5 40 7 6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51 42.5 34.5 14 12 10 M10 x 1.25 M14 x 1.5 7 56.2 Bore size Y X NN 264 232 219 215 P 181 159 146 146 S 10 8 8 8 Z ZZ Stroke range 1/8 1/8 1/8 1/4 23 20 20 20 27 25 25 21 40 32 25

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

Clamp Cylinder with Lock Series CLK1

47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 Note) Refer to pages 13 and 14 for accessories.

HRX-OM-W032

20 15 15 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40

•

NSR 18 Piston seal NBR 20 Tube gasket NSA ,-External dimensions are the same as the CS2 standard type. Refer to pages 7 to 10.

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

Series PF2W Digital Flow Switch For Water

Sensor 1 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 500 L/min Flow rate range 1 L/min 10 L/min PF2A510 0.5 L/min 10.5 L/min 5 L/min 50 L/min PF2A550 52.5 L/min 2.5 L/min 10 L/min 100 L/min PF2A511 105 L/min 5 L/min 20 L/min 200 L/min 210 L/min 10 L/min PF2A521 50 L/min 500 L/min 525 L/min 25 L/min PF2A551 Sensor Flow rate range Static Electricity

High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

N 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa F 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 0 0 10 10 20 20 30 30 40 40 Gripping point L mm Gripping point L mm MHS2-25D MHS2-25D 100 100 F Internal gripping Pressure 0.6MPa Pressure 0.6MPa 80 80 Gripping force N Gripping force N 0.5MPa 0.5MPa 60 60 Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 0.2MPa 0.2MPa 20 20 0 0 10 10

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Guide Cylinder Series MGG

25MGGM 32Stroke Stroke Stroke 1.2 2.2 2 (Slide bearing type) (Slide bearing type) (Slide bearing type) 2 1 1.5 500st 400st Deflection Y (mm) 600st Deflection Y (mm) 1.5 Deflection Y (mm) st: Stroke (mm) st: Stroke (mm) st: Stroke (mm) 500st 300st 400st 1 1 0.5 400st 300st 200st 300st 0.5 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Valve Mounting VS After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.