Regulator for 2 MPa Series ARX20

400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)

Programless controller (with stroke study) Step motor (servo 24 VDC)

17500 15 1000 20 2000 20 48 No.JXC-OMU0030-A 11.

Escapements Series MIW/MIS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Selection Mounting Warning Mounting 1.

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

Table of Contents

RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.

1

Refer to pages 11 to 13 for cylinders with auto switches.

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

A_HEC-OM-I009

HEC002-A 240 270 300 390 210 393 385 281 436 HEC006-A 270 300 280 370 240 390 382 278 455 Fig.4-3 Outside drawings of Thermo-con HEC002-A/HEC006-A 4-2 Unit Overview 4.5 Outline of operation The unit is operated as explained below. 4.5.1 Electrical diagram The unit is equipped with electrical circuits as shown below.

CYV

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner cover holding screw tightening torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK

-fl Seies

Model Position /No. of solenoid TYPe Port size (NPTR Cv factor Max.Ooerelino Response time (ms) Weight lbs (kst Plug-in Non Plug-in cycle CPM 2 position Single NVFF3l00 NVFR3110 Y1 300 30 or less 0.68 (0.31) 2.3 Double NVFB3200 NVFR3210 11 300 30 or less 0.90 (0.41) 2.3 Closed center NVFR3300 NVFRgtl0 k 1 . 9 180 50 or less 0.95 (0.43) 2.0 Exhaust center NVFF3400 NVFR3410 k 1 . 9 '180 50

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Model Position /No. of solenoid TYPe Port size (NPTR Cv factor Max.Ooerelino Response time (ms) Weight lbs (kst Plug-in Non Plug-in cycle CPM 2 position Single NVFF3l00 NVFR3110 Y1 300 30 or less 0.68 (0.31) 2.3 Double NVFB3200 NVFR3210 11 300 30 or less 0.90 (0.41) 2.3 Closed center NVFR3300 NVFRgtl0 k 1 . 9 180 50 or less 0.95 (0.43) 2.0 Exhaust center NVFF3400 NVFR3410 k 1 . 9 '180 50

HRX-OM-W004

SW screen TYPE Contact input signal 2 operation D.IN2 No.11 Setting input operation of contact input signal 2.

Compact Guide Cylinder

Refer to pages 10 and 11 for cylinders with auto switches.

HRX-OM-K003

Attach the front panel. 11. Connect the power cable to the power breaker on customer side (primary side).

Modular F.R.L. Units

Note 11) : For thread type: NPT only.

Compact Type

counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Type adjustable by flat head screwdriver Body size 100 200 205 300 400 M5 standard Made to Order Refer to page 591 for details. 1/8 standard 1/4 standard Applicable tubing O.D. Note) 3/8 standard Metric size Inch size 1/2 standard 3.2 01 03 05 07 09 11 13 23 04 06 08 10 12 1/8" 5/32" 4 Caution 3/16" 6 With One-touch fittings 1/4" 8 Be sure to read before handling.

I/O Configurator (NFC version)

Window of I/O Configurator (NFC version) 11 3.1. Basic characteristics 11 3.1.1. Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4.

Low Profile 2/3-Port Solenoid Valve

less +0.05 0 Mounting screw (Included) M2 x 11 (2 x 3 ) 2 x 2.8 2.2 2.6 2.2 (7.4) Normally closed 4.5 2 (OUT) 1 (IN) Universal 2 (OUT) 1(P) port 2(A) port 1 (IN) 3-port SX090/Universal Base hole dimension q 10 2 x M2 x 0.4 9.8 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 1.7 1.7 11.6 0.8 2.45 1.5 2.3 (Lead wire AWG#26) 300 54 3.4 10 5 3 3 1.7 10 Base hole dimension w