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10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16

Body size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard Applicable tubing O.D. 1/2 standard Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" With One-touch fittings 4 5/32" 6 3/16" 8 1/4" 10 5/16" 12 3/8" 1/2" Use 1/8" tube. 15-9-97 7 Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow

D-X 20Data 10-9-11 11 Lever Detection Switch (Proximity Switch) Proximity Switch Specifications/Maker: OMRON Corp. Mounting Position E2E-X1C1 E2E-X2D1-N Model RSH20, 32 RS1H50, 63, 80 Applicable cylinder bore size E2E-X1C1 (For RSH20/32) While holding the lever in the detection range of the switch, screw in the switch gradually until the indicator light (red) turns on.

Air Piping Compressor Air Delivery Caution Caution HAA HAW IDFA55E, 75E Compressed air inlet Compressed air outlet Use an air compressor with an air delivery of 100 L/min or larger with the IDFA3E to 75E series.

Nm (mm) 20 1.5 2.0 0.5 25 2.9 2.0 0.5 32 2.9 2.0 0.5 40 4.9 2.0 0.5 50 11.8 5.0 1.0 63 24.5 5.0 1.0 80 24.5 20.0 2.0 100 42.2 20.0 2.0 6 7 8 9 2-4. 1 2) 3 4 5 6 7 11 1 2 3 1.5~2 2 2. 12 2-5. ,AS 2-6. 2-6-1. CG5N 2-6-2. CG5A 11~2 2 31 4 5 6 7 13 2-6-3.

AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Rated flow (l/min (ANR))(1) 200 500 1000 2000 3500 6000 12000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 1, 11/2 11/2, 2 3/4, 1 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa.

NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)

D-X 20Data 10-9-11 11 Lever Detection Switch (Proximity Switch) Proximity Switch Specifications/Maker: OMRON Corp. Mounting Position E2E-X1C1 E2E-X2D1-N Model RSH20, 32 RS1H50, 63, 80 Applicable cylinder bore size E2E-X1C1 (For RSH20/32) While holding the lever in the detection range of the switch, screw in the switch gradually until the indicator light (red) turns on.

NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)

NPTF 4 poris Lead wire length Stations(n 2 4 5 7 10 11 '13 14 15 1e 18 'i9 L1 1.47 (47 5) 2.24 2.70 3.11 (68.5) (7s) 3.52 (89.5) 3.94 (100) 4.35 4.76 (110.5) (1a) 5.14 (131.5) 5.59 \142) 6.00 (152.5) 6.42 (163) 6.83 (173.s) 7.24 (184) 7.66 0s4.5) 8.O7 (2051 8.44 (215.5) 8.90 \226) 9.31 (236.s L2 1.56 (39.5) 1.97 (50) 2.34 (60.5t 2.@ \71) (&.5) \92) 4.O4 (102.5) 4.45 (113) 4.46 (n.5) \ta)

37 5200 R 1 1/2 9000 IDU55C 55 7650 50C R 2 12400 IDU75C 75 10500 35C 0.75 100 IDF1D 120 Series IDF Standard inlet air temperature type Rated temperature of 35 to 40C 1.5 200 IDF2D 235 Rc 3/8 2.2 300 IDF3D 350 R134a 9 to 12 40C 3.7 430 IDF4D 500 R 1/2 5.5 640 IDF6D 750 R 3/4 7.5 850 IDF8D 1000 1300 IDF11D R134a 11 R 3/4 1500 1300 IDF11C 15 2400 2050 IDF15C/15C1 R 1 22 3700 3150 IDF22C/22C1

Can be changed 5 At the time of shipment Analog output [V] 1 0 1050 100 10% of rated flow range 10 1000 100% of rated flow range Maximum display range Flow [L/min] 1000 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

3 Port Solenoid Valve Series VQ 100 SY Unprecedented high speed, stable response, and extra-long service life. Compact with large flow capacity.

16D MHS2 -20D MHS2 -25D MHS2 -32D MHS2 -40D MHS2 -50D MHS2 -63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 21 37 63 111 177 280 502 1 N 23 42 71 123 195 306 537 mm 4 4 6 8 8 12 16 g 58 96 134 265 345 515 952 1) 1625 L=20mm 3263 L=30mm 0.5MPa MHS3 16D MHS320D MHS325D MHS332D MHS340D MHS350D MHS363D MHS380D MHS3100D MHS3125D MHS3mm 16 20 25 32 40 50 63 80 100

Page 4 last updated 11/03/03 10:05 AM Microprocessor-Controlled Electro-Pneumatic Regulator ITV2000 EASY PROGRAMMING GUIDE ADJUSTING THE MINIMUM AND MAXIMUM PRESSURES The ITV allows the user to customize the minimum pressure (zero point) at 0% input signal and the maximum pressure (span) at 100% input signal.

Pofl size for Seres SV2000/3000/4000 sY5000-11-ts sY7000-11-11 Compact design 5 Port Solenoid Valve MetalSeal/Rubber Seal Body Ported Both 3 and 5 port valves can be mounted on the same manilold. i DIN terminal is available with g lP65 enclosure. All solenoids on one side Opronaj Jalchjng coil valve operates the same as a 2 position/double solenotd valve but uSeS only one solenoid.

-46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5