5

01 03 50 12 Part no.

Air Slide Table

16 20 25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type

Table of Contents

12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35

ISO Cylinder

10 8 G1/8 16 22 8 50 20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (53.5) 75 (78.5) 91 (94.5) 105 (108.5) 16 56 (59.5) 71.5 (75) 87 (90.5) 82 (85.5) 97.5 (101)

Table of Contents

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage suppressor With light/surge voltage suppressor With indicator light Option VDW L Light/Surge voltage suppressor Nil Z VQ Except 12 VDC, 240 VAC, other voltages

V100

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Air Cylinder

I J 20 Up to 350 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 25 Up to 400 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 32 Up to 450 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 40 Up to 800 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 50 Up to 1200 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25

Hydraulic

"n" pcs. 90 75 120 Same side (n 4) 2 (n 4) 2 (n 2) 2 15 + 50 90 + 50 120 + 50 Different sides D-B5, D-B6 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n =4 , 8, 12, 16 120 + 5 (n 2) 75 + 50 (n 2) 90 + 50 (n 2) Same side n = 2, 4, 6, 8 n = 2, 3, 4 n = 2, 4, 6, 8 10 1 pc. 120 90 Different sides 20 90 120 2 pcs. "n" pcs.

ZP

28 10.5 10.5 14 3 25 8 3.5 15 12 ZPT25B 32 34 18.9 37 ZP ZCU AMJ 10, 13, 16 Size 40, 50 Size Bellows Bellows Misc.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

It is already built-in to the rectifier circuit. 50 60 VFR 110 VAC Hz [115 VAC Hz] 50 60 3 50 60 VQ7 4 220 VAC Hz [230 VAC Hz] 50 60 50 60 Electrical entry D With connector DIN terminal (Type D) DC specifications of Type D, Y, DO and YO is only available with 12 and 24 VDC.

15

4.6 13 60 M3 x 12 M4 x 12 14 NY 2 x M4 x 0.7 8 70 50 4.6 13 60 M3 x 12 M4 x 12 11 NW 2 x M5 x 0.8 8.5 70 50 4.6 13 60 M4 x 12 M4 x 12 9 NU 2 x M5 x 0.8 8.5 70 50 4.6 10.6 60 M3 x 12 M4 x 12 11 NT 2 x M5 x 0.8 8.5 70 50 4.6 17 60 M3 x 12 M4 x 12 12 NM2 M4 x 0.7 8 50 38.2 11.5 60 7 M3 x 12 M4 x 12 10 32 NZ 4 x M5 x 0.8 8.5 70 50 4.6 11 60 M4 x 12 M4 x 12 14 NY 4 x M4 x

ZP

ZPR10D 10 16 12 18 15 16 24 25 32.9 33.9 49 50 5 6 6 7 ZPR16D Applicable Tubing Applicable tubing O.D.

CV/MVGQ

side n = 2, 4, 6, 8 15 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16, 110 + 50 (n 4) 2 Different sides n 75 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 90 100 110 20 90 100 110 75 90 100 110 10 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2

CV/MVGQ

100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 110 + 50 (n 4) 2 Different sides D-B59W n 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8

1

63 5.6 to 11.2 11.2 to 16.8 11.2 12 23 24 32 40 50 5.6 6 11.5 12 16 20 25 6 to 12 12 to 18 MG In the case of mounting -X417 on A unit side only of A/H units and mounting nothing on H unit side.

Table of Contents

(External pilot port: Body side) Option How to Order Pilot Valve Assembly SF4 DZ 1 12 Applicable model Coil rated voltage Individual pilot exhaust 12 For VFS220 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC (50/60 Hz) 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other Electrical entry, Light/Surge voltage suppressor Common pilot exhaust 13 For VFS230 G Grommet Grommet with

Air Cylinder

8 20 0 0.033 13 10.5 8 41 5 28 5 6 12 M8 x 1.25 24 M20 x 1.5 1/8 9 11.5 25 22 19.5 17 8 22 12 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 12 M10 x 1.25 30 M26 x 1.5 1/8 9 11.5 32 22 19.5 17 10 27 20 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 15 M10 x 1.25 34.5 M26 x 1.5 1/8 12 14.5 40 24 21 22 10 33 20 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 15 M14 x 1.5 42.5 M32 x 2 1/4 12 14.5 Dimensions by

MG

-www.stevenengineering.com 16 16 12 12 1 1 0.1 0.1 10 50 100 200 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 50 50 10 10 40 Load weight m (kg) 40 Load weight m (kg) 5 5 32 32 25 25 20 1 20 1 16 16 12 12 0.1 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

78 80 80 27 32 38 48 59 72 59 71 8 10 12 14 16 18 16 17 17 17 17 18 10 7 4 5 5.5 6 7.5 0.5 1 1 1.25 2 3 5.5 6.5 7.5 8.5 10 14.5 Bore size (mm) Bore size (mm) S GA ZZ GB HD HH PD (17.5) (11.5) (19.5) (11.5) 20 25 32 40 50 63 20 25 32 40 50 63 12 6 6 6 8 10 10 77 77 79 87 102 102 12 12 12 12 13 13 24.2 114 13 13 13 16 20 20 0.25 stroke (22.5) (13) 10(12) 26.7 119 M10 x 1.25 (25) (13) 10(12

MGP

Load weight m (kg) Load weight m (kg) 20 20 25 16 20 20 16 16 12 16 16 16 12 12 1 1 12 12 12 0.5 10 20 30 31 50 100 101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20