Compact Rotary Actuator

JIS hexagon socket head bolt is neatly placed in the rotary actuator groove. 4-4 Piping and operating direction Table 6 Size L Bolt 10 13 M 4 15 16 M 4 20 22.5 M 6 30 24.5 M 8 40 28.5 M 8 Fig.6 Fig-7 shows piping ports of the rotary actuator. Table-7 shows the port size.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

L1 = n / 2 x 30 + 16 L2 = n / 2 x 30 + 32 n = Number of valves (cleaning valve + gate valve + other valves) n: Stations (mm) 2 n 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 L1 L2 76 106 136 166 196 226 256 286 316 346 376 406 436 466 496 526 556 586 616 46 92 122 152 182 212 242 272 302 332 362 392 422 452 482 512 542 572 602 632 62 13 VCC Series Dimensions SUS316L Stainless steel

Heavy Duty Stopper Cylinder Series RSH/RS1H

40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 16

Plug-in Unit

Refer to manifold ordering. 23 24 21 22 19 20 17 18 Terminal no. 28AWG 15 16 6 13 14 Red 11 12 9 10 7 8 26 2 25 1 30 (20P) 37.5 (26P) Connector terminal number 5 6 3 4 1 2 Triangle mark indicator position <26P> <20P> (15.6) Polarity Terminal no. Polarity Terminal no. () L SOL. A SOL. A (+) () (+) 1 1 Station 1 Station 1 SOL. B SOL. B (+) () () (+) 2 2 SOL. A SOL.

CVRA1-E

Tighten them with hexagon socket head cap screws. 9 13 5 3 13 11 1 4 4 16 11 2 Direction of the shaft (key) Piston seal Piston seal -35Fig. 14 Piston seal and Direction of assembly of the shaft (7) Mount the pipe 20 to the sub-plate 18 and 19 and fix with hexagon socket head cap screws.

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

3 Port Solenoid Valve Series VQ100

L dimension 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No. 20 260.5 L dimension 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No. Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

I/O Configurator (NFC version)

Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4. Detailed information of units 40 3.4.1. Information tab 40 3.4.2. Details of I/O monitor tab 49 4.

I/O Configurator (NFC version)

Login to administrator mode 13 3.2. Display for wireless master 14 3.2.1. Information tab 14 3.2.2. Input/Output monitor tab 16 3.2.3. Setting tab 20 3.3. Display for wireless slave 30 3.3.1. Information tab 30 3.3.2. Input/Output monitor tab 32 3.3.3. Setting tab 36 3.4. Detailed information of units 40 3.4.1. Information tab 40 3.4.2. Details of I/O monitor tab 49 4.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4

CLS

Up to 1000 98 345 345 388.5 452 477 368 368 409.5 470 495 8 9 0.2 stroke 98 345 30 to 1000 75 133 368 98 Up to 1000 0.2 stroke 106 388.5 75 141 409.5 106 30 to 1200 Up to 1200 0.2 stroke 111 448 85 153 466 115 30 to 1200 Up to 1200 0.2 stroke 111 468 90 153 486 120 30 to 1200 Up to 998 0.2 stroke 141 579.5 105 176 595.5 30 to 1200 0.17 stroke 9-9-12 13 Series CLS Cylinder with Lock Double

NCA1

5/8 400 (4") 1/2-13 5/8 6-15-30 30 Series NCA1 Dual OperationDouble Rod Specifications 1.5 2 2.5 3.25 4 Bore size (inch) Fluid Max. operating pressure Min. operating pressure Ambient & fluid temperature Piston speed Cushion Air 250 psi (1.75 MPa) 8 psi (0.06 MPa) 40 to 140F (5 to 60C) 2 to 20 inch/sec (50 to 500 mm/sec) Air cushion standard CJ1 Basic style, Foot style, Flange style, Side

NCA1

5/8 400 (4") 1/2-13 5/8 6-15-30 30 Series NCA1 Dual OperationDouble Rod Specifications 1.5 2 2.5 3.25 4 Bore size (inch) Fluid Max. operating pressure Min. operating pressure Ambient & fluid temperature Piston speed Cushion Air 250 psi (1.75 MPa) 8 psi (0.06 MPa) 40 to 140F (5 to 60C) 2 to 20 inch/sec (50 to 500 mm/sec) Air cushion standard CJ1 Basic style, Foot style, Flange style, Side

1

-13

1.63

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

IR1000/2000/3000

Note 1) For O-ring numbers 8 and 13, use mini-flicking type. Note 2) Replacement part numbers correspond to the item numbers in the figures. 14-5-18 18 Precision Regulator Series IR1000/2000/3000 Dimensions IRV1000-01 IRV2000-02 53 55 16.5 2.3 30 22 2.3 41 (R) F.R.L.

VHK

B Q L2 L3 L4 L5 L6 L1 H 1(P) 2(A) C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 1.2 26 23 11 3.5 41 18 54 51 11 M5 M5 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 2.0 2.0 29.1 16.5 29 29.1 61.6 58.2 1 8 11 3.5 41 8.6 1.2 13 18 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 32.6 16.5 VHK-01S-01S 1 8 1 8 30 57 32.6 65.2 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

MHF2

External gripping Internal gripping L L F F MHF2-8D MHF2-12D 70 Pressure 0.7MPa 30 60 Pressure 0.7MPa 0.6MPa 0.6MPa 50 Gripping force N Gripping force N 0.5MPa 20 0.5MPa 40 0.4MPa 0.4MPa 30 0.3MPa 0.3MPa 10 20 0.2MPa 0.2MPa 10 40 20 40 30 20 10 0 0 80 60 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa Pressure 0.7MPa 120 180 0.6MPa 0.6MPa 100 150 Gripping

Pilot Operated

30 35 19.5 19.5 22.5 34 43 47 29 37 43 14 17 20 3.5 4.5 4.5 28 35 42 63 80 90 44.5 51.5 60 104 (110.5) 24 29 33 71.5 78 92 115.5 (122) 133 (140.5) ( ) denotes the value for N.O.