Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

] C10: 10 One-touch fitting 2 x G 3/4 Electrical entry (L4) (L3) L1 + 0.5 L2 + 0.5 R EXH EXH R 100.5 B B B B B B B B 49 X P X P 24.5 9.5 1B 1A 1 4B 4A 4 3B 3A 3 2B 2A 2 16 A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

] C10: 10 One-touch fitting 2 x G 3/4 Electrical entry (L4) (L3) L1 + 0.5 L2 + 0.5 R EXH EXH R 100.5 B B B B B B B B 49 X P X P 24.5 9.5 1B 1A 1 4B 4A 4 3B 3A 3 2B 2A 2 16 A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight

VFS

Stations 2 stations 02 Symbol Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 Porting specifications (A, B) Passage EA, EB P 10 10 stations Symbol Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations 1 Side 2 Bottom Common Common Please indicate manifold base type, corresponding valve, and option parts.

CRB2/CRBU2/CRB1

Applicable shaft type: W (mm) (mm) Short-shaft side Long-shaft side Size Size Y X Y = X = Y X X = Y = 10 10 1 to 8 1 to 14 1 to 12 1 to 3 Body (B) Body (B) 15 15 1.5 to 9 1.5 to 18 1.5 to 15.5 1.5 to 6.5 Body (A) Body (A) 20 20 1.5 to 10 1.5 to 20 1.5 to 17 1.5 to 7.5 30 30 Long-shaft side 2 to 13 2 to 22 2 to 19 2 to 8.5 Short-shaft side 40 3 to 9 Symbol: A24 Symbol: A23 Double key Keys

AC

-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

A1 B1 (13.5) A6 B6 1 2 Nil Robotic cable (Flexible cable) S Standard cable Connector D (14.7) 15 16 Connector A (30.7) L (11) (10) Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Weight Signal Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Product no.

0.4

D side n 1 2 3 4 5 6 7 8 2 x G3/4 Conduit port C10 [3(R) EXH port] (C12 in case of branch type) C10 [3(R) EXH port] C10: 10 One-touch fitting C10: 10 One-touch fitting (C12: 12 One-touch fitting) DIN rail clamp screw R R 45.5 77.5 3 X 3 X 49.5 B B B B B B B B 12 P 12 P 30 1 1 A A A A A A A A 13.5 C10 [1(P) SUP port] C10: 10 One-touch fitting (7.5) (12) P = 16 45 25 C4, C6, C8, [4(A), 2(B)

SYJ3000/5000/7000

length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 1-5-79 for dimentions with connector cable. 1-5-11 12 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B Courtesy of Steven Engineering

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

and turn to operature and lock override. 2-Rc(PT)1/8 (P port) 2-Rc(PT)1/8 (P port) 60.9 (GZ, GS: 61.6) [62.6] 59.9 (GZ, GS: 60.6) [61.6] 78.8 (GZ, GS: 80.2) [82.2] 10 10 91.7 (GZ, GS: 93.1) [95.1] SY B B B B B P 40 P 39 35 35 A A A A A SYJ 2 19 19 10 10 SX MAX.5 (Lead wire length) 2-4.5 VK G: 300 H: 600 (Mounting holes) (Pitch) P=10.5 10.5 VZ L2 4 L1 VF VFR 48.5 [55] VP7 36.1 A A A A 29.5

ZP

ZPT2004U ZPT10UT 2 2 2.6 1.2 10 1.2 0.3 11 4 2.6 4.6 1 ZPT04U-B-A8 ZPT3507U ZPT13UT 4 3.5 4.8 1.8 13 1.6 0.8 0.5 14 7 4.3 7.8 1.5 ZPT06U-B-A8 ZPT4010U ZPT16UT 6 4 7 2 16 0.8 17 10 5 11 2.5 2.5 ZPT10CT 10 11 0.8 ZPT08U-B-A8 8 9 1 ZPT13CT 13 14 Dimensions by Stroke 1 16 17 F: M3 x 0.5 F: M5 x 0.8 E G H J G H D Model J ZPT 6-B-A8 46 18 15 44 ZPT10-B-A8 79 23 77 84 3 6 5 8 ZPT15-B-A8 28 43 82

High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

REA/REB

axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products

REA/REB

REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

MY1

bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 counterbore depth 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 8-11-21 21 Series MY1B Standard Type/Centralized Piping Type 16, 20 Refer to page 8-11-9 regarding centralized piping

CA2

A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 40 37 38.5 69 81 69 71.5 31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5 107

Proposals for Energy Saving

Model Description AR1000 AR2000 B220 AR2500 B320 AR3000 B420 AR4000 AR4000-06 B640A Note 3) AR5000 AR6000 Bracket B120 B220 B420 B640A Note 3) Note 1) Note 2) G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 1.0MPa G36-10-01 Pressure gauge 0.2MPa (G27-10-R1) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 Auxiliary Pneumatic Equipment Air Preparation Equipment

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80