High Purity Fluoropolymer Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.
Inch Threads Bore size (mm) Bore size (mm) 12 16 20 25 Dd9 (inch) l d d H B C Part No.
Port B Release button Release button Chuck Collet Seal Seal Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R male thread KM15 KM16 Seal Port A Port A Release button Seal Body O-ring Body Guide Rod Collet Port B Chuck Port B Release button Release button Seal Chuck Collet Seal Port A: One-touch fitting Port B: One-touch fitting Stud
Operate Integrated Controller / Rod Type EQYH Series EQY16, 25, 32 How to Order EQY 25 D H B 50 B 5 Size Motor mounting position/Motor cover direction Motor mounting position: In-line Motor type Lead [mm] 16 25 32 Symbol EQY16 EQY25 EQY32 H 20 24 A 10 12 16 B 5 6 8 C 2.5 3 4 H Battery-less absolute (Step motor 24 VDC) Symbol Motor cover direction1 Size D 25/32/40 D1 Left side 16 D2 Right
A B D-Z7, D-Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A B B B 3.8 11.3 9.8 (8.3) 13.8 6 26 24.5 (23) 28.5 10 32.5 31 (29.5) 35 15 40.5 38.5 (37) 42.5 20 33.5 41.5 39.5 (38) 43.5 25 44 52 50 (48.5) 54 32 Auto switch mounting and mounting dimensions are same as those for the standard type.
(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63
Y1 Plate 25 31 X 41 Z A A port B port B port A port 29 F 0 0.036 9h9 A parallel key is used instead of single flat for size 40.
130 110 150 20 11 22 14 60 80 129 20+0.084 0 MB-S10 100 114 120 90 15 158 132 184 26 13.5 24 17 75 100 129 25+0.084 0 MB-S12 125 136 142 105 18.5 186 160 212 26 13.5 24 25 85 115 157 25+0.084 0 Double clevis pivot bracket B DX Z + Stroke DD DB B 90 4 x DT B A DS DH DE DC DO DO 4 x DR DU DU DA DL Rubber Bumper [mm] Part no.
A M E T E R S 20, 25, 32 Model A B C D E F G H I Y ZPR10D 10 12 15 24 32.9 49 60 83 94 6 ZPR16D 16 18 16 25 33.9 50 61 84 95 7 A P P L I C A B L E T U B E Applicable Tube O.D.
ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.
S + Stroke M H CH2 CHA Stroke range Bore size (mm) MM A M MA C NA PJ D F NB SS G GA K P Y ZZ B E GB H J S V Z Related Products 32 25 to 800 18 15 46 18 12 23 25 14 35 7 1/4 60 45 33.2 M6 x 1 7.5 M14 x 1.5 56 5.5 153.5 30 12 43 103 128 40 25 to 800 22 19 51 22 12 32 25 19 37 3/8 62 63 41.7 10 73 6.5 185 9 34 18 47 128 153 M8 x 1 M16 x 1.5 D50 25 to 800 28 25 57 28 9 33 25 24 42 1/2 67 75 52.3
B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (7.5) Dust-protected SI unit: L5 = 16n + 108, L6 = L3 + 25, L7 = L4 + 25 Dust-tight, Water-jet-proof SI unit: L8 = 16n + 118.5, L9 = 16n + 131 L10 = L3 + 50, L11 = L4 + 50 Formula
B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (7.5) Dust-protected SI unit: L5 = 16n + 108, L6 = L3 + 25, L7 = L4 + 25 Dust-tight, Water-jet-proof SI unit: L8 = 16n + 118.5, L9 = 16n + 131 L10 = L3 + 50, L11 = L4 + 50 Formula
15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port
Keyway dimensions l b Model Port size Rc A B C F H J K S U W BA BB CA CB SA SB SC SD SE DD (h9) D (g6) CDRA1BS50 CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x
(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A
B B B B B B O S N.C.: Gray N.O.: Black M5 x 0.8 S O 1/4 V Applicable models AC10, AC20 Barb fitting Applicable tubing T0604 Width across flats 17 10 One-touch fitting Bracket mounting size Accessory specifications Standard specifications With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104 85 26 50 AC10 AC20 AC25
Nickel plated Rolled steel plate Spacer 13 Nos. 26, 27, 28, 29 above CY1S6-PS-N Oil retaining bearing material Bushing 14 10 CY1S10-PS-N Hard anodized Aluminum alloy Plate A 15 15 CY1S15-PS-N Hard anodized Aluminum alloy Plate B 16 Nos. 20 CY1S20-PS-N Hard chrome plated Carbon steel Guide shaft A 17 25, 26, 27, 28, 29, 30 25 CY1S25-PS-N Hard chrome plated Carbon steel Guide shaft B 18 above
5 6 18.5 22.5 20 25 20 25 7 Compact Cylinder with Lock Series CLQ Dimensions/20, 25 Foot type: CLQL/CDLQL Special cap bolt L G B + Stroke Foot type (mm) LY LH S Stroke range Without auto switch With auto switch Bore size (mm) B 78.2 85.7 19.5 22.5 68.2 75.7 A LS A B 34.5 38.5 LS X 5.8 5.8 X 4 3.2 29.5 32.5 44.5 48.5 5 to 50 5 to 50 20 25 4-6.6 LZ LX LS + Stroke A + Stroke Bore size (mm)
Fittings & Tubing Air Cylinders Rotary Actuators 91.7 [96.1] Approx. 300 (Lead wire length) L1 L2 3.5 2 x 3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 52.2 [54.4] 51.4 [53.6] 17.3 30 3 91.7 [96.1] 78.8 [83.2] 78.8 [83.2] A A A A A 13.5 B B B B B P R P R P R P R 29.2 30 17.3 25 7.5 12 51.4 [53.6] 25 52.2 [54.4] 13.5 B B B B B A A A A A 3 5.2 2 x 3.5 (For mounting) Manual