3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Note) Note) For the special voltages, please consult with SMC. 4-14-11 Body Ported 12 Series VQZ100/200/300 How to Order Manifold: VQZ200/300 VV3QZ 2 2 08 C D Series Option 2 3 VQZ200 VQZ300 Nil None DIN rail mounting style (With DIN rail in standard length) DIN rail mounting style (Without DIN rail ) D DO Note) Note) Order DIN rail separately.

3 Port Air Operated Valve Series SYJA300

(Lead wire length) (Station 1) (Station n) (Light/Surge voltage suppressor) + + + + 67 [74] 51.6 35 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 63.5 63.5 63.5 63.5 X X X X P P P P 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 R R R R 90.2 Max. 10 91.1 Pg7 78.1 [85.1] Approx. 300 (Lead wire length) 54 71.5 M8 x 1 81.7 51.6 Approx. 300 (Lead wire length) 93 67 [74

7.4

Base Mounted Manifold D side U side 6 7 3 2 1 Stations 0 1 8 9 753 S0700 Series Dimensions SS0755-SAm M5 Cm Nm 48.5 300 (Lead wire length) 43 SI UNIT EX510-S001 68.5 (Double solenoid dual 3-port) 48.2 (Single solenoid) COM PWR 76.5 (Closed center) 39.7 Grommet (n-1) x 8.5 L1 L2 51.4 300 (Lead wire length) (4.5) 4.5 43 19.8 12.7 8.5 8.5 13.7 7.7 M3 x 0.5 External pilot port (External pilot

MY1

(RedGreenRed) D-Y7BWV D-Y7BW D-Y7NWV D-Y7NW D-Y7PW Perpendicular D-Y7PWV Auto switch part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Note 4) When specifying more than one option, indicate them alphabetically. 2.10-11 VQZ100/200/300 Body Ported How to Order Manifold VQZ200/300 VV3QZ 2 2 08 C D Series DIN rail mount 2 3 VQZ200 VQZ300 None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) D DO Order DIN rail separately Refer to p.2.10-17 for DIN rail part number.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E G LEKFS32mm-100m 295 106 230 4 130 LEKFS32mm-200m 395 206 330 6 2 300 280 LEKFS32mm-300m 495 306 430 6 2 300 280 LEKFS32mm-400m 595 406 530 8 3 450 430 LEKFS32mm-500m 695 506 630 10 4 600 580 18 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: Motor Parallel LEKFS40R 24 Motor option: With lock 153 Cable length 250 20 Motor cable 15 65

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

0.4

or D.

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

7

E U 300 1.2 7.5 T 5.5 5.5 A b a IN OUT B 2 x P Port size 4.5 4.5 L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet

CNS

D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

They can be ordered in lots of 10 pieces. d D Series SY3000 SY5000 SY7000 Part No.

SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 P N 1 2 D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

D B Reed auto switch D-A93 Solid state auto switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Grade 2 Grade 2 Rubber stopper Grade 4 Grade 4 Metal stopper Auto switches / Proper mounting position for stroke end detection 11-/22MXP6 A A C D D B Reed switch D-A93 Solid state switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

G D G 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ G D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V Transmission line Transmission line Black White Brown Blue Crimped connector SL-J1A Main transmission line Transmission line 24V 0V Power supply{ 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ Special

100

mm L: With lead wire (300 mm) M: With lead wire (300 mm) MN: Without lead wire Vacuum pressure switch q Output N NPN open collector 1 output P PNP open collector 1 output A NPN open collector 2 outputs B PNP open collector 2 outputs C NPN open collector 1 output + Analog voltage output D NPN open collector 1 output + Analog current output H: Lead wire length 600 mm LN: Without lead

ZP

A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16