EXxx-OMZ0016

Setting range: 20/40/100/200/500/1,000/2,000/5,000 msec (6) Input information while wireless communication is not established Specifies input information for when the wireless communication is disconnected. CLEAR: Clear the input. HOLD: Fix the input at the current value. (7) Wireless communication Sets the operation status of wireless communication.

PA3000/5000/PAX1000

P-80 (D)

VVX31/32/33

% % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

ZMA

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-27 8 Series ZMA Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for vacuum pressure T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (P, E port) Release flow adjustment screw 3-Rc 1/8 SUP.

MHL2

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

IR1000/2000/3000

P-84.5 (YG)

Guide Table Series MGF ø40, ø63, ø100 1

10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

Clean Exhaust Filter

Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch fitting type Symbol Applicable tubing O.D.

VQ7-6/7-8

Series VQ7-8: Manifolds P.22 How to Order Manifolds P.23 Manifold Dimensions (DIN Connector Type) P.24 Manifold Dimensions (Prewired Connector Type) Manifold Options P.25 to 27 Option Dimensions P.28, 29 Manifold Option Mounting Bolt Part Numbers P.30 Manifold Exploded View P.31, 32 Manifold Specifications Sheets P.33 to 36 Safety Instructions P.37 5 Port Solenoid Valve/Precautions P.38

Short Stroke Electric Actuator Series LX

200 0.7 0.5 0.2 0.1 0.6 0.4 0.2 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3 0.1 Speed (mm/s) 100 1.1 0.6 0.2 0.1 200 0.7 0.4 0.2 0.1 Refer to page 302 for acceleration time. 217

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

Intrinsically Safe Valve

(A)4 2(B) (A)4 2(B) Locked position Number of solenoids Single 1 (P) (EA)5 3(EB) 1 (P) (EA)5 3(EB) LOCK 2(B) (A)4 2(B) (A)4 Double PUSH (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) Caution How to Use Plug Connector When operating the locking type D with a screwdriver, turn it gently using a watchmakers screwdriver. [Torque: Less than 0.074 lbfft (0.1 Nm)] Caution 1.

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

E-P HYREG

IRV 2 VEX 1(P) 3(R) 2(A) Simplified main circuit n SRH SRP 1 SRF 3(R) 2 ITV Simplified pilot circuit 1(P) 2(A) P2 P1 3(R) 1(P) IC 1(P) 2(A) n E-P HYREG Ease of handling ITVH Having the amplifier built into the electro-pneumatic pilot valve, only an external power supply and signal (voltage, current) need to be connected.

Plug-in Unit

Values for double types are when the switch is ON. 4 position dual 3 port valve (A) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C. N.C. 4 position dual 3 port valve (B) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.O. N.O. 4 position dual 3 port valve (C) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C.

SYJA3000

SYJ5000-21-1A 1 pc. 1 (P) 3 (R) 0.2 Caution 0.1 0.2 0.3 0.4 0.5 0.6 Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Series SY100 3 Port Solenoid Valve Rubber Seal

Solenoid Specifications 3 (R) 1 (P) 1 (R) 3 (P) Order Made P.2.1-15 13 24 SY1 A 13 24 SY1 Series Grommet (G), (H), L plug connector (L), M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60Hz 100, 110, 200, 220 Allowable voltage 10 to +10% Power consumption (W) (1) DC 0.75W (With light: 0.8W) 0.5W (With light: 0.55W) 0.9 (With light: 1.0) 100V 110V [115V

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

E-P HYREG ® Series VY1 1

pressure (MPa) P port pressure (MPa) VY1 VY140 0 1 VY150 0 1 G PPA A port pressure (MPa) A port pressure (MPa) Set point Set point Set point Set point Set point Set point AL P port pressure (MPa) P port pressure (MPa) VY190 0 1 VY170 0 1 A port pressure (MPa) A port pressure (MPa) Set point Set point Set point Set point Set point Set point P port pressure (MPa) P port pressure (MPa) 14-10