Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

MHF2

Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 12-3-5 6 Series MHF2 Model Selection Effective Gripping Force: Series MHF2 Step 2 External Gripping Internal Gripping The air gripper should be operated so that the amount of overhang "H" will stay

MHF2

Gripping force N Gripping force N 150 0.5MPa 0.5MPa 80 120 0.4MPa 0.4MPa 60 90 0.3MPa 0.3MPa 40 0.2MPa 60 0.2MPa 20 30 100 0 80 60 40 20 0 80 60 40 20 100 Gripping point L mm Gripping point L mm 12-3-5 6 Series MHF2 Model Selection Effective Gripping Force: Series MHF2 Step 2 External Gripping Internal Gripping The air gripper should be operated so that the amount of overhang "H" will stay

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

173 4 51.5 59.5 87.5 98 5 62 70 100 110.5 6 72.5 80.5 100 110.5 7 83 91 112.5 123 8 93.5 101.5 125 135.5 3 41 49 75 85.5 L1 L2 L3 L4 1.12-20 VQZ1000/2000/3000 Body Ported VQZ2000 (35) (5.5) 44.5 Mounting holes VV5QZ22 C 28 (11) Station 20 (7.5) DIN rail clamp screw n-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5

EXxx-OMY0006CN

0 10 msec 0 1 1 50 msec 1 0 0 100 msec 1 0 1 1 sec 1 1 0 5 sec 1 1 1 Bit 7 Ch0/4(0) 0 3 msec 1 5 msec *1oo1 ChN/ChN+4 Table 10-12 Safety Mode (Module Passivation/xxx)Byte5Ch1/5(0) Bit 1 Bit 0 Ch1/5(1) 0 0 Disable 0 1 1oo1 (Input 1, 5) * 1 0 1oo2 2-channel equivalent 1 1 1oo2 , 2-channel non-equivalent Bit 3 Bit 2 Ch1/51 0 0 Input1UT1 Input5UT2 0 1 Input1 & 5UT1 1 0 Input1 & 5UT2 1 1

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS Cylinder: CYV32-100 Workpiece weight: 5 kg Average speed: 100 mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours. Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper No rubber bumper Double-side

VCL

7 Class 2 Class 3 Class 4 Symbol 2 3 4 5 7 3 N.C. for manifold Valve type Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Electrical entry Grommet Conduit Conduit terminal Conduit terminal with indicator light DIN terminal DIN terminal with indicator light DIN terminal (without connector) G C T TL D DL DO Note 1) Class B in AC has a rectifying circuit built-in

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

PSxx-OMF0005CN

0.01 mm 0.01 mm ISA2-G ISA2-H 1.5 64 5 m 2.0 64 5 m 50kPa 30kPa [mm] [mm] [mm] [mm] -20No.PS-OMF0005CN-E ISA2-G ISA2-H 1.5 64 5 m 100 kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G ISA2-H 100 kPa 1.5 64 5 m 100 kPa 2.0 64 5 m [mm] [mm] [kPa] [kPa] -22No.PS-OMF0005CN-E ISA2 ()

VDW

Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Please consult with SMC regarding other voltages.

EXxx-OMQ0015CN

PLC -10..+10 V 01050 +0.00+10.50 V -0.00-10.50 V 3276833818 -5..+5 V 0525 +0.00+5.25 V -0.00-5.25 V 3276833293 -20..+20 mA 02100 +0.00+21.00 mA -0.00-21.00 mA 3276834868 0..10 V 01050 +0.00+10.50 V 0..5 V 0525 +0.00+5.25 V 1..5 V 75525 +0.75+5.25 V 0..20 mA 02100 +0.00+21.00 mA 4..20 mA 3002100 +3.00+21.00 mA :PLC x100 +10.50 V PLC 10.50x100=1050 x100 16 1 -10.50 V PLC 10.50 100 =

OMU0023

, 10 D0418 2 Load mass [10g] 5 Yes to 100 Movement mode No D0419 2 1 0 , 1 No. 1 (0: ABS, 1: REL) (No. 0) Note 5) D041A 2 Threshold force value [0.1] 1 1 to 50 Yes D041B 2 Positioning width [m] 1 0 to 30 Yes Yes AREA A position 1 [m] More than D041C 4 1 Note1) 0 Note 1) Yes AREA A position 2 [m] More than D041E 4 1 Note1) 0 Note 1) Yes AREA B position 1 [m] More than D0420 4 1 Note1) 0 Note

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

With auto switch P411030-5 CRB1LW63 CDRB1LW63 2-12 56 90 83 39 Nut & washer Bolt & washer 8-9.5 75.5 110 39 83 60 5 30 30 90 44 44 52 100

ZSE30/ISE30

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14

SMC Pneumatic Clean Series

Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520

Thermo-chiller

type 0.1 5 to 40 V V V HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option