High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

53

A Air-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) When multiple options are combined, indicate symbols in alphabetical order.

Compact Type Dual-Rod Cylinder Series CXSJ

2-M5 x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 12 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3

Pin Clamp Cylinders

L32 pin clamp cylinder available O Compact design makes it applicable to a broad range of workpieces. OContributes to a lightweight jig.

CL

range (mm) Bore (mm) AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J A Without rod boot to 500 to 600 to 600 to 750 to 750 With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 MXW 40 50 63 80 100 27 32 32 37 37 60 70 86 102 116 96 108 115 129 140 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 113 124 15 17 17 21 21 26 27 26 30 31 54 59 67 72 76 10 13 18

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Lightweight and Compact

Contents Applicable model HRS-EP020 NPT thread conversion fitting set HRS090-A-20/40-J HRS-EP021 G thread conversion fitting set Part no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

For magnet mounting 8 2.5 L 4.7 6-M3 x 0.5 depth 4 15 15 (mm) MA Z W V S M L K J H N Model 6 60 40 44 10 21 20 20 52.4 32 6.5 MXP10-10B 18 90 65 74 20 39 36 36 82.4 50 7.5 MXP10-20B 10 Series MXP Dimensions MXP12 2-M4 x 0.7 depth 6 2-M3 x 0.5 depth 4 Z 3 With metal stopper V K 5 4 G Max. 4 Max. 3 7.5 M 20 Stroke: S MXP12-15 Width across flats 2 Width across flats 6 Piping port A 2-M5 x 0.8

OMR0032

A circuit to which power is supplied by a secondary coil of a insulated transformer that meets the following conditions Maximum voltage (No load): 30 Vrms (42.4 V peak) or less Maximum current: 8 A or less (including short circuit) Limited by circuit protector (such as fuse) with the following ratings Voltage without load Maximum current (V peak) rating (A) 0 to 20 V 5.0 Over 20 [V] up to

S Couplers Series KK/KK13

27.2 13 T T A A Width across flats H Width across flats 22 H Width across flats A T Connection male threads T Connection male threads Effective area mm Min. bore Weight g Model Effective area mm Min. bore Weight g Model A L L 41.5 R 1/8 30 R 1/8 81 18 45.5 34 19.0 6 6 22.6 KK13P-01M KK13S-01M 14 42.5 R 1/4 31 R 1/4 86 22 24.1 7 -02M -02M 48.5 37 42.1 R 3/8 30.6 R 3/8 89 7.5 35.3 27 31.1

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

HEC_W-E

Range Setting range : 0.1 to 9.9 C Min. increment : 0.1 C O v e r l o a d J u d g i n g Indicated content : Overload judging temp. range (Ex. : 0.2 C) T e m p .

PSE540/560

200 g 194 g 201 g 187 g 203 g 193 g Weight With sensor cable 101 g 108 g 102 g 109 g 95 g 111 g 101 g Without sensor cable 16-3-27 6 Series PSE560 Internal Circuit PSE56Voltage output type 1 to 5 V Output impedance Approx. 1 k PSE56--28 Current output type 4 to 20 mA Allowable load impedance 500 or less (at 24 VDC) 100 or less (at 12 VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

the CXSW15-10 and the CXSW15-20 have a groove cut out for installing auto switches.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3 -X 20#1 Data Slide bearing Long stroke View A-A @9 Component Parts Material Material Note Note No. Description No.

Compact Cylinder with Air Cushion

Note 2) Since sizes 20 and 25 have a body with B type (through hole) and A type (double end tapped) in common, there is no A type part number. Example) RQA 20-30 does not exist.

10

S F S + m g S F S m g S Absorbed energy E E1 + E2 E1 + E2 E1 + E2 E1 + E2 Note 2) E 2 2 E 2 2 E 2 2 E 2 2 Equivalent mass Me Note 1) This is the momentary speed at which an object is impacting against a shock absorber.

Applicable Auto Switch Model

(Tolerance 30%) 5.3-39 Solid State Switch/Direct Mounting D-Y59 /D-Y69 /D-Y7P(V) A B A B Applicable Actuator Series Grommet Series Bore size (mm) MGQ, MVGQ, MGP CXS MY1B MY1C, MY1M, CY1R MY1H, ML2B MGF CY1H RSH 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 6, 10, 15, 20, 25, 32 25, 32, 40, 50, 63, 80, 100 25, 32, 40, 50, 63 25, 32, 40 40, 63, 100 10, 15, 20, 25, 32 20, 32, 50, 63, 80 Specifications

RQ

Note 2) Since sizes 20 and 25 have a body with type B (Through-hole) and type A (Both ends tapped style) in common, there is no type A part number. Example) RQA 20-30 does not exist.

LVQ

(mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-S LVQ30-S LVQ40-S LVQ50-S LVQ60-S 25.5 46 31.5 58 33.6 56.5 12 77 21.8 37 5 7 15 31.3 21 25.3 23.5 47 29.5 59 45.4 77 16.5 95 32 50 6 7 20 37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41 82 75 127 25 141 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 150 60 88 10 7 20