Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

HEC-OM-S008

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

Digital Gap Checker

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Use the table as a guideline for mounting. Auto switch mounting bracket part no. BMG2-012 Auto switch part no. D-M9(V)/M9W(V)/M9A(V) Note) Use a screwdriver with a grip diameter of 5 to 6 mm to tighten the set screws (M2.5). The tightening torque should be 0.5 to 1 Nm. As a rule, it should be turned about 90 beyond the point at which tightening can be felt.

PF-OMM0004_C

-D IN 3F.S.8 cm (100 L/min 11 cm ) PF3W704 PF3W720 PF3W740 PF3W711() -75No.PF-OMM0004-D PF3W721() -76No.PF-OMM0004-D PVC 3F.S.11 cm PF3W711/721(PVC ) -77No.PF-OMM0004-D PF3W704S PF3W720S PF3W740S -78No.PF-OMM0004-D / (PF3W704/720/740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W704

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

High Speed Pilot Operated

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating

PFxx-OMS0001CN

Rc NPT 160 g 240 g G 170 g 245 g +80 g +25 g +30 g -67No.PF-OMS0001CN-A 1()10024 551005009.5 221002003.8 2OUT 30()90% ON(OFF) 4 5 60()90% 7 8 9 M8 ZS-40-A AWG23 0.7 mm PVC 1.1 mm PVC 4 -68No.PF-OMS0001CN-A A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min PFMC7501(500 L/min) PFMC7102(1000 L/min) kPa

Model Selection 1

Apparent power (VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W = V/A cos. For DC, W = V/A. (Note) cos shows power factor. cos = 0.6 2. Surge voltage A high voltage which is momentarily generated in the shut-off unit by shutting off the power. 3.

VNH

Main port 2 Port 2-Rc 2-Rc Pilot port A B C D E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B

Multistage Ejector (N)ZL Series

)ZL212-G P V Exhaust with silencer Vacuum adapter 1/8 7 With vacuum adapter (N)ZL212-GN P V Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL212-E P V RESETSET Approx. 500 Section A (L: approx. 2900) 2-4.4 Mounting hole MULTISTAGE EJECTOR 76 52 8 27 178.5 5 4.5 Section A with digital vacuum pressure switch (40) (N)ZL212-E (ZSE4) (N)ZL212-EB (ZSE4B) (N)

LFE-OMY0008

NPN1 V (80 mA ) PNP1.5 V (80 mA ) 5 7 0.25 s/0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 563% 663% 0.25s0.5s

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

Miniature Guide Rod Cylinder Series MGJ

Table a Standard strokes Table b Intermediate stroke (by the 1 mm stroke) Bore size (mm) Applicable stroke (mm) 1 to 15 (Spacer type) 1 to 20 (Spacer type) Bore size (mm) Standard stroke (mm) 5, 10, 15 5, 10, 15, 20 6 10 6 10 Model no.: MGJ6-9 Installing a 1 mm width spacer for MGJ6-10 External size: same as MGJ6-10 Example Minimum stroke for auto switch mounting is 4 mm.

Fluoropolymer Piping Equipment

Metric size Inch size Series Appearance Class LVW 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 11/4" 25 4 3 1 2 3 4 5 6 7 LQ1 Union reducing LQ3U-R LQ3 LQ3 : B side : A side LVN P.925 LQHB 1 2 3 4 5 6 : A side Union elbow reducing LQ3E-R TL TIL : B side TLM TILM P.926 TD TID 1 2 3 4 5 6 : B side Union tee reducing LQ3T-R TH TIH : C side : A side P.927 Note) : A side tubing O.D.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

Series AP3100

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

Sine Cylinder Series REC

(mm) (mm) A H MM NDH10 NX1 U1 R2 Y Z A1 E1 L1 MM NDH10 R1 NX U1 A Applicable bore size (mm) 20 25, 32 40 Bore (mm) 20 25, 32 40 Part no.