Made to Order

-XC88 -XC89 CA2 Basic: CA2B G 2 x P 2 x Cushion valve G Width across flats KA 4 x J MM D E B C H1 AL WA WA B C B1 A K N ZZ + Stroke S + Stroke N F M H (mm) Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA M MM N P S WA H ZZ A 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 17.5 15 15 19 19 15 17 17 21 21 8 11 11 13 16 M8

Battery-less

JXC51/61 JXC 1 Model Lead Pushing speed [mm/s] Pushing force (Setting input value) LEYG16M L mE A/B/C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80 LEYG40M L mE A 24 to 30 50 to 65% B/C 21 to 30 60 40 0 20 Min. 20%

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Smooth Cylinder/Low Speed Cylinder

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

Electric Actuator/Slider Type

LE-CSB-S is MR-BKS1CBL M-A -L manufactured by Mitsubishi Electric Corporation. LE-CSE-S is MR-J3ENCBL M-A -L manufactured by Mitsubishi Electric Corporation. LE-CSM-R is MR-PWS1CBL M-A -H manufactured by Mitsubishi Electric Corporation. LE-CSB-R is MR-BKS1CBL M-A -H manufactured by Mitsubishi Electric Corporation.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K L M C D E H I A A B F 5.5 P M5 x 0.8 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 14 7 34 33 Rc 1/8 7.5 10.5 13 16 45 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 14 7 40 Rc 1/8 8 11 13 16 52 69 11 8 M10 x 1.5 50 Rc 1

smcmaintenancepartslist

100 125, 140, 160 P.343 Construction 40 to 100 @5 C A D B 125 to 160 @7 L F E E K H J J M G The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CL1.

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

5

Pivot Bracket Pin (For CM2YC) Pivot Bracket Pivot brackets consists of a set of two brackets. 7.5 40 7.5 40 3.4 3.4 6.8 6.8 R3.4 R3.4 6.8 6.8 25 25 R3.4 R3.4 Dd9 d 0.2 17 0.2 17 R11 R11 m m L2 +0.15 +0.05 +0.15 +0.05 CD CD L1 t t 5.2 40 5.2 40 3.2 3.2 57 28 57 28 (mm) (mm) Applicable bore size Part no.

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Table of Contents

Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.

ISO Cylinder

M U U D F B G B E E H C P A [mm] Bore size Part no.

ZP

with Ribs M Model A A B C D2 E F G H J Vacuum inlet direction q Pad dia.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1= L2 = M4 x 0.7 M4 x 0.7 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A18 Symbol: A17 Shorten the long shaft. Shorten the short shaft. A parallel keyway is used on the long shaft for size 40.

MGP

Note 2) Model MGPL (ball bushing) cannot be used as a stopper. 1 5 20 30 40 50 10 Transfer speed: (m/min) Bore Sizes 32 to 100/MGPM32 to 100 (Slide bearing) MGPM32 to 100 (Slide bearing) m m 2000 l: Approx. 50mm l: Approx. 50mm 100 1000 80 Weight of transfered object: m (kg) 63 500 400 50 300 40 200 When selecting a model with a longer l dimension, be sure to choose a bore size which

LJ1H

(mm) L2 (mm) L3 (mm) Pitching Rolling Yawing m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145

Table of Contents

(VX31, 32, 33) 20 Model Minimum AC/DC Ambient temperature (C ) 40 10 Operating fluid temperature (C ) Temperature conditions Power source Sketch Air Vacuum 60 10 40 AC/DC Maximum AC/DC 20 Minimum Position ON X X P A P A X OFF X X A R (VP) A R X ON X X A R (VP) X A R OFF X X P A X P A ON Pq A A Pq Pq A Pq A A Pq OFF Pw A A Pw Pw A A Pw Pw A Note 1) An exclusive type set with

CQ2

D (M) 20 CQ2B Bore size Stroke D (C)(M) 12, 16, 20, 25, 32, 40, 50, 63 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Clean series 10Relief style 11Vacuum style Copper free series The rod portion of the actuator has a double seal construction, and a relief port is provided to discharge the exhaust air directly outside of the clean room.

Table of Contents

A VMG M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M5 x 0.8 M-5ALN-6 M-5ALU-6 M5 x 0.8 Barb Elbow for Nylon Tubing: M-5ALHN-4/-6 Barb Elbow for Soft Tubing: M-5ALHU-3/-4/-6 Effective area (mm2) Weight (g) Width across flats 7 M-5ALHN-4 M-5ALHU-3/-4 Model A B C D M-5ALHN-4 M-5ALHN