PF2D Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
40 40 34 17 17 13 60 60 60 40 32 25 20 20-0.033 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 22 200 to 1000 32-0.039 0 66 21 52 247 217 204 200 191 P S H2 H1 Bore size MM 8 6 6 5 N I K ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 236 181 159 146 146 7 200 to 1000 150 to 1000 150 to 700 150 to 700 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 M32 x 2 M26 x 1.5 M26 x
20 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 10 20 30 40 50 5 10 15 20 25 0 0 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) Viewing the flow rate characteristic graphs The flow rate characteristics indicate the relationship between the vacuum pressure and the suction flow rate of the ejector, and
Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.
20 46 48 78.4 134 136 92 132 63 55 45 10 55 52 104 25 25 52 54 78 146.5 148.5 104.5 138 With front mounting hole Metal cover type NA0.05 NC NB0.05 Release point Y VC0.1 VB0.1 K +0.1 0 Metal cover open 2 x V H7 depth I 4 x NN depth S VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32 63.5 63 15 55 13 36.5 15 M8 x 1.25 13 8 30 32 63.5 4 CKZ3N -X2742A
20 stations 8
Accessories Series VQ100 Blanking Plate Ass'y Plug Ass'y VVQ100-12A1 2 3 VVQ100-10A-1 Finishing O.D.7.8 For VV3Q11 12 3 Cover color : Ivory 1 4 17 10 5 Blank plate with gasket and screws. 11 16 17 20 L 52 30 10 1 Plug
6 Single acting, spring return Piston seal CQ2B12-S-PS Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS CQ2B16-S-PS Gasket CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size.
25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.
Ball screw allowable rotation X axis specifications in-line mount (side mount) 200 20 40 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 750 20 40 4000 Allowable rotation rpm 20 40 3000 High rigidity direct acting guide 2000 kg mm/s mm 30 1000 15 2000 50 1000 25 2000 100(75) 1000 50(37.5) 2000 1000 0.05 (897) 1) When axes are combined, select each axis considering
S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
Combination of K, L and V cannot be achieved because an auto drain can only be attached to a single option. Note 3) Refer to pages 101 and 102 for further details on optional specifications. Note 4) Option H (Auto-drain bowl type: Metal bowl) is only applicable to the IDFA6E-20.
Apply an appropriate tightening force during mounting.
46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62 285 157 60 45 4.5 80 100 2 x M8 x 1.25
. 12 12 1 A S D F9NV S MIW Double finger type 20 30 1 A S D F9BV S Single finger type MIS Scraper Cylinder bore Nil S No Yes Number of auto switches 12 2 pcs. 1 pc. 12mm 20mm Nil S Stroke adjuster 20 Type of auto switch Nil A No Yes Stroke Without auto switch (built-in magnet) Nil 10 20 30 10mm 20mm 30mm Refer to the table below for auto switch part numbers.
Do not install in Zone 0 (as defined in IEC 60079-101:2008) or Zone 20 (as defined in IEC 60079-10-2:2009) Zone 0 area classification: An area in which an explosive gas atmosphere is present continuously or for long periods or frequently.
Nil Without auto switch (Built-in magnet) S 1 pc. 6 25 6 mm 25 mm For the applicable auto switch model, refer to the table below. n n pcs. 10 32 10 mm 32 mm 15 40 15 mm 40 mm Adjustment type 20 20 mm Nil With adjusting bolt B With shock absorbers (2 pcs.) Port thread type With shock absorber (With plate A) Installed on side A at time of shipment.
(Example) D-Y7NWL Impact resistance . 1,000m/s (102G) Insulation resistance . 50M or more at 500VDC (between lead wire and case) Withstand voltage . 1000VAC for 1 min. (between lead wire and case) Ambient temperature ... 10 to 60C (14 to 140F) Enclosure .
180 Angular Type Air Gripper Rack & Pinion Type MHW2 Series 20, 25, 32, 40, 50 How to Order M9BW 20 MHW2 D 1 Made to Order Refer to page 712 for details. 2 fingers Number of fingers 2 Number of auto switches Bore size 20 25 32 40 50 Nil 2 pcs. 20 mm 25 mm 32 mm 40 mm 50 mm S 1 pc. n n pc.