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With mounting threads on the bottom Low power consumption type 0.8 W (Held at 24 VDC) Low power consumption type 0.8 W (Held at 24 VDC) VDC) VX23: 11.5 W 10.5 W VX22: 8 W 7 W Reduction of power consumption (DC specification) VX21: 6 W 4.5 W For orifice sizes 2, 3, 4.5, and 6 Installation example Bracket High Vacuum Angle Valve Made of Aluminum Body, Plate: PEEK Diaphragm: EPDM/FKM/FFKM

Refer to "3.5 Pairing" for details on pairing. (2) Click [FCS Setting]. -27No.EX##-OMV0017-D Set using the [Frequency Channel Select Window]. (1) (2) (1) W-LAN Channel indicators The W-LAN indicators make it possible to select frequencies corresponding to W-LAN channels at one time. * In the example above, W-LAN Channel: CH.10 is selected. (2) W-CH indicators The W-CH indicators make it possible

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

light & surge suppression M : With lead wire (Length: 300mm) H : 600mm lead wire LO : Without MZ: Lead wire w/light & surge suppression LOZ: W/out lead wire with light & surge suppression LO U : W/out lead wire with light & surge suppression for flat cable manifold MO: Without MOZ:W/out lead wire with light & surge suppression 12 12 12 12 12 12 How To Order Series SYJ3000 Preferred Option

-l-rormaV open 'Consult lactory ior availability 'Body Optio.l a Port Size OIT:With/8NPTF O2T:W|Ih%NPTF subDlate subolate -,*^w'" w For type 4031,41R manifold -:lndividual pilot exhaust (Std.)

DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

28.4 6 14 1/4 KQ2Y10-02GS 17 15.9 15.6 17 20.6 28.6 20.6 44.6 15.6 40 28.4 7.5 24.5 3/8 KQ2Y10-03GS 17 15.9 15.6 17 20.6 29.5 20.6 45.1 15.6 40 28.4 7.5 25 1/2 KQ2Y10-04GS 22 15.9 15.6 17 20.6 33.5 20.6 47.8 15.6 40 28.4 7.5 47.4 Connection thread (With sealant) 10 Release button dimensions 12 1/4 KQ2Y12-02GS 17 18.5 18.2 17 23 29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03GS 17 18.5

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.

F5PW Indicator light / Operation D-A59W D-859W D-F5-W, DGs',W, D-J59W, D-Fs'F, D-.J59W, D-K59W. DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock.

1W 2 WAREA ON W 1 W 1 *W 1W 2 PARA W 1=W 2=0 WAREA OFF (-) (+) W 2 W 2 * * 1 1 * 11 11 * 12 12 * *1 46 - 11.3 12 1CW [CW] 2CCW [CCW] 12 1[] 2[SW] *1 * *1 *1 * 0[] 1a [a ] 2b [b ] 02 SW * 21 21 * *1 47 - 12 12.1 ( ) *1 2 M 2 1 12.2 * []0 [] / M 48 - 12.3 []1 1 INP ON (/) M 2 () INP OFF 3 [1] INP OFF INP ON 49 - [2] INP ON 12.4 1 2 3 PLC 2 12.5 3

D-A9V D-F9V D-F9WV A 22 (20) 5 (7) W B The dimension in ( ) is for D-F9V and D-F9WV. (mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

Adapter z c Pad x W Pad W Horizontal lifting Vertical lifting This type of application should basically be avoided. 726

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

point L(mm) MHY2 W MHKL2-25S MHKL2-25C MHW2 M 100 100 MRHQ 80 80 Holding force (N) Holding force (N) L Pressure 0.6MPa Auto switch 60 60 Pressure 0.6MPa 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa 0.3MPa 0.3MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L(mm) Holding point L(mm) 2.4-11 Series MHK2 Dimensions MHK2-12l/Standard model 9 2-M3 X 0.5 thread depth 4 (Mounting thread) 15 3H9

. 40 200 32 Caution 100 Handling Precautions 1.