Series VQ Metal Seal/Rubber Seal Body Ported

SI unit output No. 0 1 2 3 4 5 6 7 8 9 SI unit output No. 0 1 2 3 4 5 6 7 A B A B B A Void A Void A A B A B B A A A SY Double Double Double Double Double SI unit SI unit Single Single Single Single Single SYJ Stations 1 2 3 4 5 Stations 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

IIIIIII

(kg) 11.46 (5.2) P.T. ln(mm) 0.12 (3) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.19 (5) '75 PSIG (5 Kgf/cm2) -ffi 2 WaY DIMENSIONS A B c D E F G H J K M 't.57 (40) 1 . 1 8 (30) 2.40 (61) 2.05 (52) o.87 (221 0.51 (13) 0.98 (251 0.63 (16) 1.06 (27\ 0.31 (8) 1 . 2 6 (32) Millimeters in Parentheses HOW TO ORDER NV[f220-N02-40 : 2 way; 2 portr/e" NPT WFoot Pedal NVM23O-NO2-40 : 3 way; 2 poft 1/4" NPT w

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 1.5 mm 1.27 mm 1.65 mm 1.27 mm Rated current 3 A 4 A 3.1 A 4 A Rated voltage 125 V 60 V 125 V 60 V Contact resistance 40 mW or less 5 mW or less 40 mW or less 5 mW or less Insulation resistance 1000 MW or more 100 MW or more 1000 MW or more 100 MW or more Withstand voltage 1.5 kV 1.0 kV 1.5 kV 1.0 kV Rating/Performance Ambient temperature Connector 25 to +60C

Microspeed Cylinder

As a rule when W + Pa>PA adjust P so that W + Pa = PA. (2) Installing a regulator with check valve at position (b) can decrease lurching during descent and actuation delay during ascent. As a rule adjust P so that W + PA = Pa.

NCQ8

") 2 NCDQ8A(B)-100T(M) NCDQ8A(B)-200T(M) 1 0.37 (3/8") 0.25 (1/4") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 0.37 (3/8") 0.37 (3/8") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 2 47 Series NCQ8 Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch D-A9 (V) Solid state switch D-M9 (V) D-F9 W(V) B A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures

ITV

L-bracket 2.3 30 36 52 40 22 Straight type 3 m Cable connector TM-4DSX3HG4 50 Right angle type 3 m 4 x 5.5 8 x 4.5 4 x 7 22 TM-4DLX3HG4 50 36 40 84 40 36 22 40 5 36 7 4 x 5.5 8 x 4.5 22 14 20 60 70 12 1.6 14-8-15 16 Series ITV1000/2000/3000 Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF.

Compact Cylinder

(mm) D-A9 D-M9 D-F9 W D-F9BAL Auto switch model Symbol A B W A B W A B W Hs 22 24 27 30 36 41 20 25 32 40 50 63 15.5 15.5 19 20 13.5 15.5 8.5 10.5 12 12 18.5 20.5 11.5 11.5 15 16 9.5 11.5 5.5 7.5 9 9 15.5 17.5 3.5(1) 14.5 14.5 18 19 12.5 14.5 9.5 11.5 13 13 19.5 21.5 -9.5 -7.5 -6 -6 0.5 2.5 -0.5 1.5 3 3 9.5 11.5 5.5(3) Bore size (mm) 7 (4.5) 7 (4.5) 13.5(11.5) 15.5(13.5) The dimension inside

Heavy Duty Stopper Cylinder

Work W Work W Work W Work W Bracket Cylinder goes up Cylinder goes down Lever basic position Lever locked Lock released With cancel cap With lever detection switch RSQ When the lever stands erect (when the energy is absorbed), the switch turns on a signal that determines the pallet has reached the stop position. (For details of lever detection switch, refer to page 595.)

XLAQ/XLDQ

26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface Symbol Nil

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

SMC Pneumatic Clean Series

A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM NN Z 40 32 25 20 Bore size 50 45 45 41 16 13 13 13 6 6 5 8 8 8 5 4 4 4 75 75 75 M26 x 1.5 M20 x 1.5 26-0.033 0 26-0.033 0 M26 x 1.5 32-0.039 0 8 10 36 82 M32 x 2 25 Series CM2R 10-/1121-/22Direct mount type cylinder 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 R A 40 150 C73 21 C D M 2 R A 40 150

CJ2

Bore MM A D L R N W Flat Round TDH10 TZ TY TX TN TW TK TV Part No.

Pulse Valve

or less 0.5 A or less 0.5 A or less Power supply fuse 3 A 1 A 1 A Two-time Hitting Function Interrupt Operation Function A two-time hitting function has been adopted to improve the bag filter dusting efficiency.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

rep-modular-e

Rotate the set nut clockwise with a hook spanner to settle the parts to the bracket (panel). Refer to the Check item for tightening torque. ARG20(K) ARG30(K) ARG40(K) ARG20(K)/30(K)/40(K) Hook spanner Nominal: ARG20(K) ARG30(K) ARG40(K) When mounting the bracket for ARG20(K)/30(K)/40(K), ensure that the roulette faces of the set nut and the bracket are mated appropriatelly.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Rotate the set nut clockwise with a hook spanner to settle the parts to the bracket (panel). Refer to the Check item for tightening torque. ARG20(K) ARG30(K) ARG40(K) ARG20(K)/30(K)/40(K) Hook spanner Nominal: ARG20(K) ARG30(K) ARG40(K) When mounting the bracket for ARG20(K)/30(K)/40(K), ensure that the roulette faces of the set nut and the bracket are mated appropriatelly.

VM

5 w !3 EA EA y A A P P r q B EB B EB !4 !7 !1 !2 t Componet Parts Aluminum alloy NBR Notes No. !1 !0 Description Material PBT ADC Material Notes No. q Description Piston guide B Valve Metallic plated Only external pilot style: ZDC Black zinc chromated Pilot body Body w e Stainless steel Return spring ZDC Head cover r Stainless steel Spool sleeve !2 !3 !4 Rubber Cushion !

39

stop Arm length L Clamp arm (Distance to a hard stop) Arm length L Shim q Cylinder Cylinder (Distance to a hard stop) Upper hard stop Clamp arm Shim q Shim w Upper hard stop Unclamping cylinder port Unclamping cylinder port Shim w Clamping block Clamping cylinder port Clamping cylinder port Clamping block Hard stop section A Hard stop section A Series CKZ3N Series CKZ3T Mounting process