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(C) Outlet air press. dew point (C) Ambient temp.

Battery-less

21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80 LEYG40M L mE A 24 to 30 50 to 65% B/C 21 to 30 60 40 0 20 Min. 20% 10 0 20 30 40 50 60 70 Max. 65% Model LEYG16M LmE

ZP

SMC vacuum pad Search http://www.smcworld.com Catalogs ZP2 ES100-76 ZP3 ES100-100 Best Pneumatics Pad diameter Symbol 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 U C C C C C C MU EU AU C C C C C C C UM UT C ( ( CT C C B C C C C C Note) Note) J ( ( ( MB ( ZJ ( ( D C C C AN Note) Note) Note) MT ( ( ( W U H C C C C C C ( ( ( HT ( ( HB C C C C ( C C ( 30 x 50 ( HW U ( ( ( (

Modular Design with Uniform Body Style

V V V V V b Lead wire length r L 3 m V V V V V Z 5 m V V V V V + c Pressure unit of the scale plate Nil MPa V V V V V V: Without restrictions v: With restrictions (Refer to *1 and *2.)

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Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

Aluminum High Vacuum Angle Valve

V M A C U U M type plug connector (AC power supply) not attached for M of sizes 16 and 25.

SY

regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

A

E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg Center Back Mount 18 or 14 Connection 42mm Diameter Face GZ46 A T H R E A D T Y P E Rc(PT) N NPT M O U N T I N G Standard C Panel Mounting C O N N E C T I O N T H R E A D 01 1/8 02 1/4 M M5 (10-32Nom) Female I N T E R N A L

ZP

5AN-4 N6 For 6 nylon tubing M-5AN-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H H B C F Model A B C D2 E F G H Vacuum inlet direction q Pad dia.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 0.030 0.060 Type C 5 for axis 0.030 0.060 Type C 8 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 14 for axis 0.050 0.093 Type C 18 for axis 0.050 0.093 Type C 22 for axis 0.065 0.117 7-6-20 21 Accessory Bracket Series CQ2 Simple Joint: 32 to

Smooth Cylinder/Low Speed Cylinder

Applicable bore size (mm) 32, 40 50, 63 80 100 Dd9 B C H d m t d L1 Part no.

smcmaintenancepartslist

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Fluoropolymer Piping Equipment

TLM TILM Dimensions TD TID Tubing extension union elbow: LQ1E-T TH TIH B side D M H B L3 L2 M C A side SMC 6 1 25 (E) C L1 H Class 6 Class 2 to 5 Metric Size Inch Size Model A side B side B C E H L1 L2 L3 M Min. port size Applicable tubing O.D. Tubing size (D) Model A side B side B C E H L1 L2 L3 M Min. port size Applicable tubing O.D.

Electric Actuator/Slider Type

W F1 Rod operating range Note 1) (Stroke + G mm) T Z V EV H thread depth C U M M J D 4 x O1 thread depth R Y L B + Stroke K Note 2) M M S 4 x O1 thread depth R A + Stroke EH Note 1) Range within which the rod can move.

2 Phase Stepper Motor/Without Motor Brake Series LXS

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through Refer to Cross section C-C, bottom view.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Values at the initial period) JIS Symbol (A) 4 (B) 2 1 (P) 3 (R) 2-8-4 5 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Valve model Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv L M L M L M L M Body ported VQD1121-M5 0.05 0.31 0.19 0.05 0.16 0.22 U W VQD1121 -M5 0.07 0.28 0.28 0.07 0.24 0.27

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale:

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C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

Electric Actuator with Integrated Guide

Model Allowable Moment (Nm) Allowable dynamic moment Model Mounting orientation Load movement direction LTF6 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) Pitching 100 m a=1000 a=2000 a=3000 L1 30 20 10 0 Transfer load m (kg) L2 200 a=1000 a=2000 a=3000 Mer L2 (mm) Rolling Yawing 100 m L2 Mer 30 20 10 0 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100

5

D C Clevis Pivot Bracket Pin (For CM2YE(V)) H B (mm) Part no. Applicable bore size B C D d H SN-020B 20 26 30 25.5 M20 x 1.5 8 Material: Carbon steel Dd9 d SN-032B 25, 32 32 37 31.5 M26 x 1.5 8 SN-040B 40 41 47.3 40.5 M32 x 2.0 10 m m t t L1 L2 (mm) Trunnion Nut Part no.