Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: One-touch Fitting ø4mm, Straight Type, Option 1: w/o Lead Wire, Option 2: Panel Mount Adapter, Option 3: -

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: 01 (R 1/8), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N7L (One-touch Fitting ø1/4", Elbow Type), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6H (One-touch Fitting ø6mm, Straight Type), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N7H (One-touch Fitting ø1/4", Straight Type), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6L (One-touch Fitting ø6mm, Elbow Type), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C4H (One-touch Fitting ø4mm, Straight Type), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

VXA21/22

Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

AN

valve Measurement distance: 1m R(PT) R(PT) M3 M5 1 8 1 8 Port size Fluid Noise reduction dB(A) 16 21 13 18 Compressed air Max. operating press Ambient and fluid temperature 1.0MPa 5 to 50C Effective area (mm2) Weight (g) Dimensions (mm) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Note) NPT thread for AN101 and AN110 is alsoavailable.

LEF-OM006xx

PNP 6P 6P NPN NPN 1N * LECP1 1N * 48mm T T LECP1 PNP PNP 1P * 1P * NPN NPN AN * AN * LECA6 LECA6 PNP PNP 3 00 mm 300 300 AP * AP * 2000 2000 2000 mm B 8m 8 8 B 10m 1.5 m 1 1 A A 15m m 3m 3 3m 3 B B 20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P

Series KC Self-seal Fittings

M5 Part No.

VFR3000-OMY0001

N.O.3 3 1) 0.9MPa 2) 3) 50 4) 2 5) P ARBF3000,ARBF4000 ARBF3000,ARBF4000 ,P AB ARBF3050ARBF4050 A B P 1.0MPa 1) B A 0.10.83MPa 2) -560 () 3) N.C. N.O.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Discharge port (FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

High Vacuum L Type Valve

(Refer to Chapter 7, Parts Replacement Procedure (P. 14 to 18) for details.) 6 XL-OMS0001-B 3. Product Specific Precautions 3 Precautions 3 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.

Multistage Ejector Series ZL112/212 1

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Exhaust port Rc 1 25 Vacuum pressure gauge Exhaust port With vacuum pressure gauge ZL212-G P V Exhaust port Vacuum adapter Rc 1/8 7 With vacuum adapter ZL212-GN P V Vacuum pressure switch Exhaust port With digital vacuum pressure switch ZL212-E P V RESETSET ~ = ~ = 500 (L

IDX-OM-W011

C D E F G H J K L M N P Q IDF1E Rc3/8 69 101 270 32 21 330 IDF3E Rc3/8 473 67 304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150 IDF2E Rc3/8 51 232 138 24 327 IDF4E / IDF6E / IDF8E / IDF11E ( 10 :0.8m) [ AC100V ] [ AC200V ] (:1.9m) [ AC200V ] (17) mm A B C D E F G H J K L M N P Q IDF4E Rc1/2 453 13 498 568 31 42 283 355 80 230 32 15 284 15 240 80 275 IDF6E Rc3/4 455 270 485 IDF8E

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Model Specifications AN101-01 AN110-01 AN120-M3 AN120-M5 R R M3 M5 1 8 1 8 Port size (1) Noise reduction (dB (A)) Fluid Max. operating pressure (2) 13 18 16 21 Compressed air 1.0 MPa 5 to 150C (3) Ambient and fluid temperature Effective area (mm2) Weight (g) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370