SMC Corporation of America
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as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

x 0.5 Tightening nut Washer with teeth E2E-X2D1-N (For RS1H50/63/80) 13 7 30 26 Vinyl insulation round cord 3.5 (18/0.12), 2-wire, Standard 2m, Cord extension (Individual metal piping), Max. 200m Indicator light Tightening nut M8 x 1 Washer with teeth 3 Output Circuit E2E-X1C1/3-wire E2E-X2D1-N/2-wire Brown (Red) Brown (White) +V +V Load 100 Load Black (White) Proximity switch main circuit

x 0.5 Tightening nut Washer with teeth E2E-X2D1-N (For RS1H50/63/80) 13 7 30 26 Vinyl insulation round cord 3.5 (18/0.12), 2-wire, Standard 2m, Cord extension (Individual metal piping), Max. 200m Indicator light Tightening nut M8 x 1 Washer with teeth 3 Output Circuit E2E-X1C1/3-wire E2E-X2D1-N/2-wire Brown (Red) Brown (White) +V +V Load 100 Load Black (White) Proximity switch main circuit

US1 LED . 6-6 US1 LED US1 OFF US1 OFF , (17 V ) US1 (17 V 20.4 V) ON US1 ON 21.6 V 6.4.6. US2 LED . 6-7 US2 LED US2 OFF US2 OFF , (17 V ) US2 (17 V 21.6 V) ON US2 ON 22.8 V 49 No.EX-OMU0020CN 6.5.

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) i Controller Nil Without controller Cm1mm With controller 1 D T 7 C Communication plug connector, I/O cable*4 Interface (Communication protocol/Input/Output) Mounting Symbol Type Applicable interface Nil

A I R C U S H I O N .Both Ends N .None H .Cap End R .Rod End *Note: Non Adjustable Cushions are available on units above 4Bore Please Consult SMC Customer Service **Note: Cushions not recommended for Strokes below 3 How To Order MT4 With Non Standard XI Dimension NCA1 T X46US (XI = Total Inches) T Specify XI Dimension in inches Construction Type S T Y L E O P T I O N O V E R S I Z E D R

A I R C U S H I O N .Both Ends N .None H .Cap End R .Rod End *Note: Non Adjustable Cushions are available on units above 4Bore Please Consult P/A Customer Service **Note: Cushions not recommended for Strokes below 3 How To Order MT4 With Non Standard XI Dimension NCA1 T X46US (XI = Total Inches) T Specify XI Dimension in inches Construction Type S T Y L E O P T I O N O V E R S I Z E D R

1.2 = 8.4 [kW] V 20C After 15 minutes, cool 32C down to 20C.

bushing / / (Except r/i6) ~~~-v : :, ~,-lI ---wCK z ' S z .. ' : -zz. . .. , ..

0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s) V(mm/s) 10 - Step motor (servo 24VDC) Ball screw drive LEFS40 Model 150 to 1200 Stroke

FUNC DC(-) DC(+) OUT -P PNP 1 Max.80 mA 1 V FUNC DC(-) DC(+) OUT1 OUT2 -A NPN 2 Max.28 V80 mA 1 V FUNC DC(-) DC(+) OUT1 OUT2 -B PNP 2 Max.80 mA 1 V FUNC DC(-) -19No.PS-OML0002CN-G DC(+) OUT1 -C OUT2 NPN 1 Max.28 V80 mA 1 V 1 k FUNC DC(-) DC(+) -D OUT1 NPN 1 Max.28 V80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) DC(+) OUT1 -E OUT2 PNP 1 Max.80 mA 1

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Indicator light Electrical entry Wiring (Output) Special function 0.5 Nil 3 (L) Applicable load Type 5 (Z) AC DC 12 V A93 In-line Yes Grommet 2-wire Relay, PLC Reed auto switch 100 V 12 V 24 V M9N 3-wire (NPN) Yes Grommet Relay, PLC Solid state auto switch 24 V M9B 2-wire 12 V Lead wire length symbols 0.5

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

Applicable Model Model AR10 Port size M5 AR 10 X406 M5 A 0.4 MPa setting w q Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphabetic order.

x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

Reed switch Solid state switch Relay, PLC C73 C73C Connector Yes 12 V 24 V 2-wire A33 A34 A44 B59W PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) G59 G5P K59 H7A1 H7A2 H7B H7C 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector G39 K39 IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit Relay