Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Indication symbol Symbol AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8"

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

Air Cylinder CLA Series Fine Lock Model

4 E1,2,3,4... 110+100111 Same surface 7s+50(n-2) n=2,3,4,,.. 90+s0(n-2) 110+50 (n'2) with 1 1 0 90 100 1 1 0 D-A4 Wi$l2 Differenl sudace 35 75 80 90 Same surface 100 100 r00 100 Different 7s+30(n-2) 80+30(n,2) 90+30(n-2) Same 100+100(n 2), n=2,4,5,8... l 0 75 80 90 Different 80 90 D-B5.86 D-G5.K5 Same 35 80 90 With n Ditlerenl 35+30(n-2) n=1,2,3,4.. n=2,4,6,a.. 80+30(n-2J E2,4,6,8... 90+30

Title not found

4 E1,2,3,4... 110+100111 Same surface 7s+50(n-2) n=2,3,4,,.. 90+s0(n-2) 110+50 (n'2) with 1 1 0 90 100 1 1 0 D-A4 Wi$l2 Differenl sudace 35 75 80 90 Same surface 100 100 r00 100 Different 7s+30(n-2) 80+30(n,2) 90+30(n-2) Same 100+100(n 2), n=2,4,5,8... l 0 75 80 90 Different 80 90 D-B5.86 D-G5.K5 Same 35 80 90 With n Ditlerenl 35+30(n-2) n=1,2,3,4.. n=2,4,6,a.. 80+30(n-2J E2,4,6,8... 90+30

PFxx-OMP0001CN

Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [ 0]) (-99 [ 0]) (-1919 [ 0]) 0999,999,990 L 1 L/min 10 L LCD 4 7 ON (OUT1/OUT2 IP40 AC1000 V 1 50M (DC500 V ) 050 -1060 () 3585RH() CERoHS Rc1/2NPT1/2G1/2 Rc3/4NPT3/4G3/4 ADCPPSSUS304HNBR 100 g 155 g +35 g +25 g +30 g -63No.PF-OMP0001CN-F 1 () 2()10024 551005009.5 221002003.8 3OUT 40()90% ON(OFF) 5 6 70()90% 8 9 10

Thermo-chiller

-W-m +HRL-JK001 G1/2 G1/2 G1/2 G1/4 G3/8 G3/4 HRL-EP018 NPT thread conversion fitting set NPT1/2 NPT1/2 NPT1/2 NPT1/4 NPT3/8 NPT3/4 HRL-EP011 G thread conversion fitting set HRLE090-A-m +HRL-JK001 G1 G1/2 G1/4 G3/8 G3/4 HRL-EP012 NPT thread conversion fitting set NPT1 NPT1/2 NPT1/4 NPT3/8 NPT3/4 HRL-EP013 G thread conversion fitting set HRLE090-W-m +HRL-JK001 G1 G1/2 G1/2 G1/4 G3/8 G3/4

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Symbol Nil N1 Compound No. 1349-80 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 2101-80 2, 3, 4, 5 2, 4, 5 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x

PFxx-OMS0001CN

DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1 (IN) M8 M8 IN OUT (UP) (SET) (DOWN) () OUT1OUT2 ON (1 ) (UP) ON/OFF (SET) (DOWN) ON/OFF -11No.PF-OMS0001CN-A F.S. ( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L

MX-OMP0051

4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5 5.5 MXQ20(A) 5.5 5 MXQ25(A) 10 8.5 ON 14 2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1

EXxx-OMQ0015CN

[GSDML ] PLC [SC_MonSs] [Monitior Short Enable 1 Circuit(Power) ] Disable -10..+10 V -5..+5 V -20..+20 mA 0..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA [Range] [Measurement -10..+10 2 V Range] Offset Binary [D_Format] [Data Format] PLC Signed Magnitude 3 2s Complement 2 None 2 Value Average 2 [Filter] [Filtering Mode] 2 4 4 Value Average 4 8 Value Average 8 [Over_Rng] [Monitor

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

LX Series Compact Electric Actuators

Duty rrtb = (t + 1 + 0,8)/ (1 + 0.9 + 1 + 0,8+10 X 100 = 50% ..Possible to us, @ Operation Sloppage Figure 2 Duty ratio: (4 + 3)/ (4 +0,2+3 +2DX 100 = 75% '.Not possiblc to use, Senies Ufi tleilnic Artuilo lfifiBli[ It|onoil lllMmce Table receives moment from each direction accordino to cenler of gravity ot work. Overhang ot work should be within the range shown in the figures below.

39

2 mm 10% Supply voltage 10 to 30 VDC 10 to 30 VDC Output N.O., PNP N.O., PNP Continuous load current 150 mA 100 mA Response frequency 30 Hz 25 Hz Housing material PBT PA6, PBT Clamping side: Red Clamping side: Red Output indication Unclamping side: Yellow Unclamping side: Yellow Voltage indication Green Green Note) Switch specifications are corresponding to manufacturers technical information

MGZ Series

: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020 / 2120 IR3000 IR3010 IR3020 / 3120 Bracket P36201023 P36202028 P36203018 Pressure gauge G33-2-01 G33-4-01 G43-4-01 G43-4-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-10-01 Accuracy 3% (full span) 2 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 Fixed throttle SUP side passage OUT side passage SUP side passage SUP side passage

α PneuAlpha HARDWARE MANUAL

Hardware Specication 2.1 Available Models PneuAlpha Hardware Specification 2 ECC-PNAL-20MT-D 12 TRANSISTOR 8 ECC-PNAL-10MT-D 6 TRANSISTOR 4 (0.70)* ECC-PNAL-20MR-D ECC-PNAL-20MR-A 100 240V AC~ 100 240V AC~ 12 RELAY 8 124.6 x 90 x 55 ECC-PNAL-10MR-D ECC-PNAL-10MR-A 6 RELAY 4 ECC-PNAL-6MR-A 100 240V AC~ 100 240V AC~ 4 RELAY 2 71.2 x 90 x 55 Model Power Supply * Without Special Connection Modules

Peltier-type Chiller Thermo-con/ Compact Type

100 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

PC Wiring System Series PCW

100 4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference