VHK (mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.
DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.
: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.
Double acting Single acting Basic type Side ported Nil E K H M D20Axial ported Single acting 12-8-15 16 Series MHC2-6/MHCA2-6 Construction MHC2-6 Double acting/With fingers open Double acting/With fingers closed Single acting r !0 o i !8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Component Parts No. Description No.
Double acting Single acting Basic type Side ported Nil E K H M D20Axial ported Single acting 12-8-15 16 Series MHC2-6/MHCA2-6 Construction MHC2-6 Double acting/With fingers open Double acting/With fingers closed Single acting r !0 o i !8 e q y !3 w !1 !6 !7 !2 t !9 !5 !
VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.
r e w q r e w q VG VP S070 VQ VKF N.C.
LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX Conduit Terminal Conduit terminal: T VXF2150/2160 VXF2280 PB Q N K VXF2150 VXF2160 VXF2280 17-3-77 8 The VX series will be revised shortly.
Insert pin material Nil Resin S Stainless steel J Common to J/K Table 1 Tubing size symbols Tubing O.D.
IDFA Series 6-1 Specifications 6 1 IDX-OM-W016 Air dryer6 References 6-3 Dimensions DRAFT AIR OUTLET IDFA3E B Q A E D AIR INLET VENTILATION WITH LAMP SWITCH AIR OUTLET THERMOMETER EVAPORATION G F C DRAFT AIR INLET DRAIN TUBE (O.D.10 LENGTH:0.8m) VENTILATION (820) J TERMINAL BLOCK N L K M H GROMMET POWER SUPPLY ENTRY(17) P Measuremm Model Thread size A B C D E F G H J K L M N P Q IDFA3E Rc3
These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting the following formula. f = k x v f: Frequency of vortex v: Flow velocity k: Proportional constant (determined by the vortex generator's dimensions and shape). Therefore, the flow rate can be measured by detecting this frequency.
Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.
When the pilot valve is energized, the armature opens, and the air filling the pressure action chamber q is released to the atmosphere through the pilot valve. q Energized (Sub-valve open) Energized (Main valve open) Due to the release of air from the pilot valve to atmosphere, the pressure in the sub-valve pressure action chamber q decreases (force pushing the sub-valve down < force pushing
0 q t r i S u y o !4 !8 !
As an equipment, calibration should be done by customer. 110C K Neoprene cross ML2B Maximum ambient temperature for the rod boot itself. C J G5-S Auto Switch Mounting Bracket Part No.
Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface
As an equipment, calibration should be done by customer. 110C K Neoprene cross ML2B Maximum ambient temperature for the rod boot itself. C J G5-S Auto Switch Mounting Bracket Part No.
Applicable Stroke Table Compatible Controllers KStandard/K Produced upon receipt of order Stroke Model LEL25 100 200 600 700 800 900 300 400 500 Step data input type Programless type 1000 K K K K K K K K K K The actuator and controller are sold as a package. Type (Controller Page 13) Confirm that the combination of the controller and the actuator is correct.
12 32.5 83 13 13 30 NCM 40 13 16 13 63 21 24 G 1/8 10 52 104 52.5 12 38 91 14 16.5 35 50 16 20 14 75 29 32 G 1/4 11.5 65 120.5 58.5 15 46.5 104.5 15.5 19 40 NCA 63 16 20 14 90 29 32 G 1/4 17.5 75 134.5 68 12 56.5 119.5 16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H