MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

“

Note 3) See pressure unit table below.

90

Note 3) See pressure unit table below.

2 Phase Stepper Motor/Without Motor Brake Series LXP

AC servomotor A Motor type 6 6 pcs. Auto switch type Note 2) Ball screw B Lead screw type Model Wiring/ Output type Lead wire length (m) Contact Symbol Lead screw lead Without auto switch Nil F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL 0.5 0.5 0.5 0.5 0.5 3 3 3 3 3 N.O. (A contact) N.O.

CG5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

Drain Separator for Vacuum Series AMJ 1

NPT ZQ 06 3/4 10 1 ZF ZP Nil 2 6 J R Option/Combinations Combination available Combination not available ZCU Option Symbol Drain cock Nil AMJ Metal bow 2 Nylon bowl Misc. 6 Drain guide J Flow: Right Left R Model Model AMJ5000 AMJ4000 AMJ3000 Recommended flow rate (l/min(ANR)) 500 300 200 Port size (Nominal size B) 3/4, 1 3/8, 1/2 1/4, 3/8 Weight (kg) 1.1 0.6 0.3 Specifications Fluid Air

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: 1 (Bracket), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: 1 (Bracket), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: 1 (Bracket), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

VQ5000

(Stations 3 and 4) VQ5300-5 1 set Valve part no. (Station 5) 1 2 3 4 5 6 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check Manual override Prefix the asterisk to the part nos. of the solenoid valve, etc.