Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

VK300

Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39 0.47 0.39 0.80 0.55 0.55 0.80 0.55 0.40 0.35 0.35 0.40 0.35 0.27 0.32 0.32 0.27 0.32 0.13 0.10 0.10 0.13 0.10 0.19 0.14 0.14 0.19 0.14 0.48 0.41 0.41 0.48 0.41 0.83 0.65 0.65 0.83 0.65 0.47 0.38 0.38

Large blow and

Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56 48 4.5 56.5 29 21.6 Rc1/4 44 ZH30 40--X185 Without bracket Air pressure supply (P) port Thread size: Q 45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Peltier-type Chiller Thermo-con/ Compact Type

Power Supply Cable MFor Single-phase 100/115 VAC type Not applicable for the 200 V type. Approx. 3 m AC adapter side Customer side Part no. Applicable model HRS-CA001 HEC-S1896 MFor Single-phase 200 VAC type Can also be used with the 100 V power type if a connector is provided by the customer Approx. 3 m Approx. 100 mm AC adapter side Customer side Part no.

Refrigerated Air Dryer Series IDF/IDU

A B Model A B C IDF1E IDF2E 410 390 IDF3E 226 470 IDF4E IDF6E IDF8E IDF11E IDU3E IDU4E IDU6E 495 435 C 565 465 270 495 435 565 465 Main specifications Series IDFE (Inlet air temperature : 35C, Outlet air pressure dew point : 10C), Series IDUE (Inlet air temperature : 55C, Outlet air pressure dew point : 10C) Series IDUE Series IDFE Model Specifications IDF11E IDU3E IDU4E IDU6E IDF8E IDF6E

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

90

B and H cannot be selected at the same time. The current bracket cannot be used for this product. Note 2) Assembly of a bracket and set nuts. Note 3) See pressure unit table below.

Miniature Regulator

(OUT) Metric size None Bracket Nil B G ARJ310-01 4 mm 6 mm 04 06 Pressure gauge Note 2) For products with pressure gauge, pressure gauge is shipped together with product.

Miniature Regulator Series ARJ310

Miniature Regulator Series ARJ310 Improved flow characteristics 0.7 Conditions: Upstream pressure 0.7MPa 0.6 Downstream pressure MPa 0.5 ARJ310-01 0.4 0.3 0.2 ARJ210-M5 0.1 0.0 0 100 200 300 400 500 Flow rate l/min (ANR) Compact and light weight Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) B C Panel type

End Lock Cylinder Series CBJ2

Part No. of Cylinder with Built-in Magnet Mounting Symbol "-A" (rail mounting) or "-B" (band mounting) should be suffixed to the part No. of the cylinder with auto switch. B L F D Basic Axial foot Front flange Double clevis Note) Lock position H R Rear end lock Front end lock Rail mounting CDBJ2B16-45-A Note) Front end lock only. Ex.

T/TIA

Color KK130 T0604-250-X64 T0604-500-X64 200 200 475 475 52 52 120 200 5.1 9.4 Black, White D1 DM KDM KB D2 D3 W KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 463

VK300

Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47 0.38 0.76 0.41 0.41 0.76 0.41 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39

Clean Rodless Cylinder Series CYP

c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

VXF

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

Filter Regulator IW Series

500 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min (ANR)] IW215 Flow rate characteristics IW222 Flow rate characteristics Supply pressure: 0.7 MPa 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 100 300 400 200 600 500 Supply pressure: 0.5 MPa 0.25 0.2 Set pressure [MPa] Set pressure [MPa] 0.15 0.1 IP 0.05 IW IW 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [

30

operating tensile and compressive force (N) Allowable eccentricity (Umm) Rotating angle Basic type Standard/Thread nominal size JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 0.5 0.5 0.75 1 300 800 1250 3100 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 20 25/32 40 50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200

Suction Guard (Produced upon receipt of order) FHG Series

Note 1) 1 1/4B 90 1 1/2B 120 Note 2) 2B 200 2 1/2B 315 3B 450 Description Part no.

Heatless Air Dryer ID Series

Z Description Bracket 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage Thread type 20 30 40 60 Symbol Description 02 04 06 1 4 1 2 3 4 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200 to 220 VAC (60 Hz) Single phase 220 VAC (50 Hz) 0 F G N