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Cooling capacity correction coefficient: Coefficient to calculate the cooling capacity at each altitude At an altitude of 1800 meters = Cooling capacity 8.4 x 0.8. Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

T type interface cannot be mounted at IN/OUT side of AW or upward handle of AR. When T type interface is used at IN side of lubricator, oil may have entered.

M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.

www.stevenengineering.com I 6.15 VACUUM VACUUM PADS SERIES ZP D I M E N S I O N S PA D D I A M E T E R S 20, 25, 32 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B I: M8X1 I: M6X1 Y F L AT T Y P E F L AT W I T H R I B Model A B C D E F G H H Flat Flat with rib G I: M8X1 I: M6X1 Y Model A B C D E F ZPR20 U C 20 23 14 29 39.8 57.6 25 83.5 73.5 4 1.7 15

Please consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

the time of shipment, and should be operated at the full stroke.

Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

M ount i ng and I nst al l at i on I nst al l at i on D i rect m ount i ng W hen t he product i s m ount ed di rect l y ont o t he panel or devi ce, use screw s sui t abl e f or t he t hread hol es bel ow . ( See draw i ng on t he ri ght ) Seri es M ount i ng t hread hol e Ti ght eni ng t orque I TV1000 M 4 0. 7 ( D ept h 6) 23N m I TV2000, I TV3000 M 5 0. 8 ( Through) 56N m Bracket m ount

Cooling capacity correction coefficient: Coefficient to calculate the cooling capacity at each altitude At an altitude of 1800 meters = Cooling capacity 8.4 x 0.8. Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Bore size (mm) Dd9 L l m d Part no.

REC Smooth acceleration & deceleration at 5 CX CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Acceleration Stroke Cushion seal RHC MK(2) 15 m/s2 5 m/s2 (REB) (REA) RS Q G High precision guide type: REAHT (Double axis) High precision guide type: REBHT (Double

REC Smooth acceleration & deceleration at 5 CX CY MQQ M Acceleration Stroke Cushion seal RHC MK(2) 15 m/s2 5 m/s2 (REB) (REA) RS Q G High precision guide type: REAHT (Double axis) High precision guide type: REBHT (Double axis) RS H A REB REA RZQ High precision guide type: REAH (Single axis) High precision guide type: REBH (Single axis) MI W S High Linear guide (Double axis) installed in the

Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN D-P5DWL type is available from 40 up to 100 only. There are other applicable auto switches other than the listed above. For details, refer to page 7-6-23.

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Applicable shaft types: K, T Equal dimensions are indicated by the same marker. 20L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M L1 = L1 Q1 = M L1= Q1 = M K axis L1 T axis Q1 Q1 (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x1.25 M10 x 1.5 Rc 1/8 Q1 (mm) 20 30 10 15 40 J axis Z axis (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 2.5 2.5 3.3 2.5 3.3 4.2 5

Note 3) At compressor discharge 30 mg/Nm3. Attachment/Accessory Part No. Part no.