CXS

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No.

CXS

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !

NCRAI seies

cRAtOBo 6.77 13.49 7.51 14.22 NCRATOTOO 15.81 31.61 17.57 33.38 nsed,e. energy is tt|e max. abscbed energy with optimum adlustnert of the cushim o Series:NCRAI NCRAAJ/3o, t'lCRAlOsO NCRATO$,80, {n r{cRAloso lo.2-2 irc8A106s 10.2-3 NCnA1080 lO.2-4 {, 6@essive Rotatim time rnay caus stbking.

VQZ100V-OMT0001

2 2 2 0.2~0.33mm 1.7mm [] () DXT170-75-1 (VQ111) [] () (V111) 1 DC24V/12V 2 AC100V 3 AC200V 4 AC 9 No.VQZ100V-OMT0001 VQZ Series/ / / / P P P P R R R R DIN DIN DIN DIN ISO#:EN ISO#:EN ISO#:EN ISO#:EN-175301 175301 175301 175301-803 803 803 803C C C C( ( ( ( DIN DIN DIN DIN 43650C)( 43650C)( 43650C)( 43650C)( 8mm) 8mm) 8mm) 8mm) DIN IP65() () 90 :3.57 ()JIS.C3306 0.5mm 2 3 1(p

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

1 Holder assembly replacement screw i Holder assembly r Insert pin assembly u Fitting nut t Insert bushing Place the insert bushing t on the insert pin assembly r. 2 !0 Insert pin assembly replacement screw Cut the end of the tubing y at a right angle and pass it through the fitting nut u.

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

MHZ

of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

MHZ

0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 4 (B) 2 Rated coil voltage Side-ported 1/2 FHG 3 4 24 VDC Side-ported 3/4 12 VDC 1 (P) 5 (R1) 3 (R2) Side-ported 1 Voltage other than above (50 VDC or less) 9 (A) 4 (B) 2 Bottom-ported 1/4 Bottom-ported 3/8 FJG Bottom-ported 1/2 1 (P) 5 (R1) 3 (R2) Option Bottom-ported 3/4 Nil Z (A) 4 (B) 2 None Light/Surge voltage suppressor FIG Sealing type 5 (R1) 1 (P) 3 (R2) Nil R Metal seal (B)

MLGC

Bore size Bore size MLGCl RSMLGC , #2 (#1+#2+#4) 3.2-8 Series MLGC Auto Switch Specifications Refer to p.5.3-2 for further information on auto switch single body.

Soft Start-up Valve AV2000/3000/4000/5000

The pressure difference generated at this time opens check valve and the residual pressure on the A port side is quickly exhausted from R port. 2 1(P) OFF 2(A) 1 3(R) 3 Soft Start-up Valve AV2000/3000/4000/5000 Construction B ON OFF B-B 1(P) 2(A) B 3(R) Parts list No. 1 2 3 Description Material Body Cap Cover ADC ADC ADC Replacement parts Description No. Part no.

IDX-OM-U021

1.3 ) M4 : 9.5mm R 1 M5 : 9.5mm M4 1.42.0Nm R M5 2.6Nm 2-9 2-2 IDF100150F 2 7 IDX-OM-U021 2 0.5mm 2 (20AWG)17mm 6 0.9m 30m (1.3 ) M3 : 6.5mm M3 0.631Nm OFF 56 alternate ON ONOFF OFF 2-2 IDF100150F 2 8 IDX-OM-U021 2 2-3 ()2 4 4.2 2-3 IDF100150F 2 9 IDX-DM-U021 3 / 3 3-1 INOUT R 3-2 ONON IN OUT 5 IDF100150F 3-1 3 1 IDX-DM-U021 3 ONOFF 0.05MPa 3-3 OFF OFF 3-4

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW R Z 60 16 A R 2 J D C 10 B M9BW R Z 60 16 A R 2 J D C 21 B Bore size (mm) Number of auto switches Built-in magnet Cylinder stroke (mm) Nil Type of auto switch Nil No Nil S n 2 pcs. 1 pc. n pcs.

C76

2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

C76

2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port