Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table Dimensions: MXQ6L / Symmetric Type 1322Axial piping

CA2

Cotter pin size CJ1 Flat washer 16 M14 x 1.5 13 55.5 3 x 18l Polished round 12 22 25 24 12 55 38 40 Y-04D +0.3 +0.1 CJP CJ2 16 M18 x 1.5 15 55.5 3 x 18l Polished round 12 27 27 28 12 60 38 50, 63 Y-05D +0.3 +0.1 CM2 28 M22 x 1.5 19 76.5 4 x 25l Polished round 18 37 28 36 18 71 55 80 Y-08D +0.3 +0.1 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

VFR

AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-28-1A Material Steel plate Steel plate NBR NBR NBR NBR NBR No. Description Material Part no. AXT625-28-3A For 01T For 01T1 For 01C For 01F For 01SU Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations For 01T For 01SU AXT623-22 NBR Rubber plug !

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

Compact

27.3 25A(28) 27 20 Motor cable length 300 102 0.3 LEC 7.5 LEC S Note 1) [ ] for when the direction of return to origin has changed.

10

x 2 28.5 34 25 +0.084 0 32 0.10 0.30 Y-03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

holes for manifold) 7 21.8 (Mounting holes for manifold) (Lead wire length) 39.1 [45.6] About 300 Bracket 23.2 equivalent (Mounting holes) 23.2 equivalent (Mounting holes) 18.5 18.5 28 [34.5] 28 [34.5] 20 20 15.6 18.5 18.5 13.5 13.5 9 9 69 69 98.6 79.4 [82] [ ]for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 24 Valve

CG1

TU TV TW TX TY TZ 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 38.3 42.1 53.8 64.6 79.2 97.2 110 130 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (mm) Part No.

MGG

depth 14.5 M16 x 2 depth 28 27 30 55 200 13.5 115 76 170 214 30 160 M12 x 1.75 depth 24 262 138 70 75 230 234 17.5 23 depth 17 M18 x 2.5 depth 32 30 32 70 245 15 125 80 210 245 35 190 304 153 M14 x 2 depth 28 80 85 280 274 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q P Y R O 63 80 100 63

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14

Stopper Cylinder

44 28 15 50 82 54 25 64 8 10 28 7 50 50 6.6 11 depth 8 1/8 1/8 1/8 24.5 56 28 19 B + Stroke R R KA KB D-X * Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not specified. 567 B RSQ Series These 3 figures show

MB

25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis, a pin (cotter pin) and a flat washer are equipped as standard.

MG

100 198 156 180 140 28 52 54 75 128 300 92 178 M14 x 2.0 28 11 124 236 188 210 166 48 72 35 47 90 148 220 320 85 121 171 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) Over 200 st Over 50 st to 200 st Over 50 st to 200 st Over 200 st Over 25 st to 50 st Over 25 st to 50 st Over 200 st Over 50 st to 200

CNS

CL Y-12 Y-14 Y-16 125 140 160 25 32 25 +0.084 0 +0.3 +0.1 0.1 0.3 46 100 M30 x 1.5 27 42 E1 NX NZ +0.3 +0.1 0.1 0.3 28 36 28 +0.084 0 48 105 M30 x 1.5 30 47 CL1 +0.3 +0.1 0.1 0.3 32 40 32 +0.100 0 55 110 M36 x 1.5 34 46 MLGC U1 L1 CNG RR1 MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

HRX-OM-S004

Table 3-12 Piping port size Name Port size1 Recommended Recommended piping tightening torque specification Circulating fluid outlet port Rc3/4 28 to 30Nm 1.0MPa and more Circulating fluid return port Rc3/4 28 to 30Nm 1.0MPa and more Facility water inlet port*1 Rc3/4 28 to 30Nm 1.0MPa and more.

Cylinder with Lock Series CNS

E1 NX 25 + 0.084 0 28 + 0.084 0 32 + 0.1 0 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 I-12 I-14 I-16 125 140 160 33 27 46 54 100 M30 x 1.5 L1 U1 39 30 48 54 105 M30 x 1.5 39 34 55 60 110 M36 x 1.5 RR1 Rod End Nut 30 d Material: Rolled steel (mm) Applicable bore size (mm) d H B C D Part No.

One-touch Fittings Series KQ2

26 28 30 28 30 1 4 13.2 10 20.5 4.6 17 5 16 23.5 15.2 12 6 18.5 NPT 31.5 6 31.5 32.5 34 17.9 17 17.46 25.5 3 8 21 7 36.5 36.5 9 17.46 1 2 21.7 17 28 22 38.5 40 9.6 22.23 Reference dimensions after NPT thread installation.

TABLE OF CONTENTS

COIL NO. 7C-101-A24 7C-102-A24 7C-103-A24 7C-104-A24 7C-105-A24 7C-1-K24 7C-2-K24 7C-3-K24 7C-4-K24 7C-5-K24 12 16 24 28 11 14 21 25 2.5 3.3 5 6 41 48 55 97 110 37 43 49 87 98 8 10 12 20 24 7C-106-A24 7C-107-A24 7C-108-A24 7C-109-A24 7C-110-A24 7C-6-K24 7C-7-K24 7C-8-K24 7C-9-K24 7C-10-K24 120 140 150 240 204 110 124 135 220 182 26 28 32 50 46 7C-111-A24 7C-112-A24 7C-113-A24 7C-114-A24 7C

2/3 Port Valve

40 28 40 33 50 33 50 43 29 43 29 28 19 28 19 18 11 18 11 12 7 8 5 5 3 3.8 2.5 1.3 1 0.7 VNB1-6A VNB1-8A VNB1-10A VNB24-10A VNB2-10A VNB24-15A VNB2-15A VNB34-20A VNB3-20A VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 1 8 1 4 770 520 770 520 500 330 500 330 320 210 320 210 220 130 140 90 90 55 70 45 23 18

PSxx-OMG0001CN

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H