45

specifications Mixed M D D side In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

Plug-in Unit

0.5 m 1 m 3 m 5 m Socket side: Straight Plug side: Straight 010 050 1 m 5 m SSPS Socket side: Angle Plug side: Angle SAPA Connector specifications S A Straight Angle Cable core wire colors Terminal no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Socket side Flat Ribbon Cable Assembly 2 x M2.6 x 0.45 Cable length (L) 10 pins 20 pins 26 pins AXT100-FC10-1 AXT100-FC10-2 AXT100-FC10-3 17.2 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 30 AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 37.5 1.5 m 3 m 5 m D-sub Connector Cable Assembly Cable Color List of Each Terminal No. Terminal no.

Fieldbus system EtherNet/IP compatible SI Unit

2 m, SPEEDCON compatible PCA-1564969: Cable with M12 connector, B code, Socket, Right angle 6 m, SPEEDCON compatible EX500-AP010-S: Cable with M12 connector, A code, Socket, Straight 1 m EX500-AP050-S: Cable with M12 connector, A code, Socket, Straight 5 m EX500-AP010-A: Cable with M12 connector, A code, Socket, Angle 1 m EX500-AP050-A: Cable with M12 connector, A code, Socket, Angle 5 m

Ionizer

Nil P NPN specification PNP specification Cable full length 1 m 2 m Symbol 01 02 Individual Special Order (Please contact an SMC sales representative.) Note 1) 11 m or longer power supply cables are not CE Marking-compliant. Note 2) Use standard power supply cables for 3 m and 10 m lengths.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

S Couplers Series KK/KKH/KK13

L1 D1 D2 Min. bore size M Body size Mass g L2 Model Urethane tubing Nylon tubing KK2P-23H 3.2 3.7 3.3 2.5 4.4 7.0 23.7 12.7 K M5 -04H 12.3 4 3.4 Applicable tubing 10.0 8.0 8.1 3.4 8.1 -06H 26.7 6 13.5 4.0 10.0 M M KK3P-04H 4 16.0 3.9 7.9 3.2 5.6 12.0 10.0 35.4 -06H 6 17.0 10.1 9.1 4.7 12.8 14.0 12.0 D1 D2 18.4 1/8 H 38.6 -08H 8 18.5 15.7 13.2 16.0 14.0 6.0 22.6 39.7 -10H 10 21.0 22.6 17.6

Vacuum Ejector Series ZM

Standard supply pressure Nil A Side/Bottom entry Side entry Vacuum switch electrical entry M S 0.35 MPa 0.45 MPa 0.5 MPa H Body style Nil L C CL CN Nil L Grommet type, with 0.6 m lead wire (ZSE1) Grommet type, with 3 m lead wire (ZSE1) Connector type, with 0.6 m lead wire (ZSE1) Connector type, with 3 m lead wire (ZSE1) Connector type, without connector assembly Grommet type, with 0.5 m lead

Series IDG

Specifications 0.01m (95% filtered particle diameter) Outlet air filtration degree Max. 0.1mg/m (ANR) (0.08ppm) Note 1) Outlet air oil mist concentration (prior to oil saturation 0.01mg/m (ANR) or less (0.008ppm or less) Note 1) With inlet air oil mist concentration of 30mg/m (ANR) (24ppm) Applicable models IDG3V to IDG50V (standard dew point 20C) (4F)) IDG3HV to IDG50HV (standard dew point

ISA2

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

IDX-OM-W023

TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2 TB C12 ILS MC GFCI OLR

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

6 m PCA-1558836: Cable with 7/8 inch connector, Socket, Right angle 2 m PCA-1558849: Cable with 7/8 inch connector, Socket, Right angle 6 m PCA-1564927: Cable with M12 connector, B code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m,

90

Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

ZQ-OM01301

ZQ-OM01301-A Vacuum pump system Model of a single unit ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3)(4) (5) (6) (7) (8)(9)(10) (1) Body type (6) Vacuum pressure switch unit specifications U For single unit Nil Note 4) With unit selection function M For manifold M Fixed SI unit (kPa) P Note 4) With unit selection function (2) Solenoid valve combination (Initial value: psi) K1 Supply valve (N.C

Manifold Specifications

Component parts Cable length 1.5 m 3 m 5 m 8 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 Plug MIL standard Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Applicable base VV5Z3-45F For details, refer to page 3-3-8.

Fieldbus system PROFIBUS DP compatible SI unit

PCA-1558823 Cable with 7/8 inch connector, Socket, Straight 6 m PCA-1558836 Cable with 7/8 inch connector, Socket, Right angle 2 m PCA-1558849 Cable with 7/8 inch connector, Socket, Right angle 6 m PCA-1564927 Cable with M12 connector, B code, Socket, Straight 2 m, SPEEDOCON compatible PCA-1564930 Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDOCON compatible PCA-1564943 Cable

Modular Type Air Filters Series AF

When 40 m is rquired: 1-40 2 If indicating 7 only, the filtration rate is 5 m. Optional filtration rate is required, indicate like 17-. Ex.) When requiring stainless steel and 40 m; 17-40 3 The bowl of series AL is used. 4 This symbol indicates the port size.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-C PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40-(F,N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D VHS20W-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30W-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40W-(F,

High Purity Chemical Valve

M No leak design (quadruple seal) M Nut lock mechanism (sealing) M High flexural strength (tubing supports) Main applications and fields LVC VC LVC VC LVC LVA LVA LVA LVH VH LVH VH LVH Chemicals IC manufacturing lines Food processing Chemicals Medical For shut off Medical equipment Analytical Instruments Analytical Instruments For air bleeding Pharmaceutical manufacturing Cleaning equipment

ZQ-OM01401

(PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.