Electric Actuator / Slider Type 《 AC Servo Motor 》

When the positioning mode is set: The minimum unit of the travel distance of the actuator should be 1 [m]. 9 - LECSB LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

With Factory Installed

Be sure not to have any upward turns in the drain line which would prevent drainage. -0.25 H---''t' .:c ' +-+-t---+--r--.---t~-+.,,-,H 06~L 0.5 ,~__:8Not suitable for a compressor with capacity less than 0.7Skw. (100 f! Imin (ANR)) ~ ," --f '" ~OA ~ OOperating pressure is 0.1 MPa{1.0kgf!cm2} or more.

Pin Clamp Cylinder Series CKQ/CLKQ

Indicator light Lead wire Oil resistant vinyl heavy-duty cord, 6, 0.5 mm2, 2 cores (Brown, Blue), 3 m Note 1) Regarding the common specifications of the solid state switches, refer to page 16. Note 2) Regarding the lead wire length, refer to page 16.

15

40 39 11 28 2 6 60 5.8 8 5.5 CY1F CY1SG20-Z 10 9.5 21.6 44 8.5 62 36 37.5 24 19 20 M6 x 1 M6 x 1 10.5 22 17 5.4 16 2 5.5 8 46 45 16 70 5.8 28 5.5 10 CY1SG25-Z M6 x 1 M6 x 1 10 11 26.4 52 8.5 70 40.5 40.5 27.5 21.5 21 12.5 22 17 6.5 16 2 5.5 8 54 53 20 70 49 7.5 7 10 CYP CY1SG32-Z M8 x 1.25 M8 x 1.25 12.5 14 33.6 64 9.5 86 50 50 33 26 24 11.5 23.5 17.5 8.6 20 5.5 66 64 26 52 2 9 85 9 5.5

CYPSeries

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

Digital Flow Switch Series PFA For Air Series PFW For Water

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( ) Refer to "Flow Rate Setting Mode

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

Stainless Steel One-touch Fittings Series KG

H (Hex.)

CEx-OMQ0011

E F G H ML2B25 110 220 206 42 138 93.5 16 73 ML2B32 140 280 264 51 168 107.5 19 88 ML2B40 170 340 322 59 204 130.5 23 106 LD LL MM NN PP SS YY ZZ 5.6 9.5 M5x0.8 9 Rc1/8 30 37.5 Rc1/16 6.8 16 M6x1 12 Rc1/8 35 45 Rc1/16 8.6 15 M8x1.25 14 Rc1/4 40 54 Rc1/8 V 26 7-2 27 7-3 R03-P8F 28 8-1 8-2 AC DC LCD 29 9-1 9-1-1 0.1 ()0.1[MPa] 1 (2) 1 () 2 () 2 () 3 4 (LM ) ()() (1 2 30 14.5mT

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

Title not found

/8 M6 x 1 1/2 Hex 10-32 Thd. 1/2 Hex M6 x 1 1/2 M6 x 1 10-32 to M5 (F) EX-M6 (M-F) 92 10-32 to 1/8 (F) M6 to 1/8 BSPT (F) M6 to 1/8 (F) 1/2 1/8 NPT 11/16 13/16 Ref. 13/16 Ref. 5/16 9/32 5/16 1/2 5/16 1/2 7/16 Hex 45 1/4 .314 Major Dia.

Compact

Without brake 5.8 t-_1 r l o l : r = tl-Model D F J K L N L X S H _ B _ 5 0 4 6 270 1 7 7 177 6 52 55 L X S H _ B _ . 7 5 4 6 295 202 202 6 47 65 LXSH B -1OO 8 320 227 227 6 47 75 LXSH B -125 4 8 70 345 252 252 6 4 7 85 T-slot A dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake electrical

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1 SPEED Forward speed switch 16 forward speeds are available. !2 Reverse speed switch 16 reverse speeds are available. !3 ACCEL Forward acceleration switch 16 forward acceleration steps are available. !4 Reverse acceleration switch 16 reverse acceleration steps are available. !5 CN1 Power supply connector Connect the power supply cable. !

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-78 5 Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting, Elbow Type/Universal Type Dimensions Elbow type L5 D3 H (Hexagon width across flats) Applicable tubing O.D. d AS A L4 ASP D1 ASN L3 AQ ASV AK M1 ASS D2 T L1 ASR L2 ASF Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

ASV Inch size M1 L3 L2 AK Applicable tubing O.D. d D1 ASS L6 D2 L1 ASR D4 L4 H ASF (Hexagon width across flats) (Hexagon width across flats) D4 D3 A1 L5 A2 L6 T Inch Size Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T d 1/8" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" ASD230F-U10/32-01T ASD230F-U10/32-03T ASD230F-U10/32-05T ASD230F-U10/32-07T

VS 8-2/VS 8-4

SV MODEL (SI No.EX126D-SMJ1) 15 4 x M5 mounting holes SI unit Formula: L1 = 19n + 71, L2 = 19n + 175.5 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 6 5 4 3 2 9 242 346.5 90 194.5 1 128 232.5 223 327.5 8 204 308.5 10 261 365.5 11 280 384.5 12 299 403.5 13 318 422.5 14 337 441.5 15 356 460.5 16 375 479.5 185 289.5 166 270.5 147 251.5 109 213.5 L1 L2 12 kit (D-sub connector) F Series